{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,2]],"date-time":"2025-09-02T00:03:50Z","timestamp":1756771430909,"version":"3.44.0"},"reference-count":10,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,10]]},"DOI":"10.1109\/sensors43011.2019.8956622","type":"proceedings-article","created":{"date-parts":[[2020,1,15]],"date-time":"2020-01-15T03:50:51Z","timestamp":1579060251000},"page":"1-4","source":"Crossref","is-referenced-by-count":1,"title":["Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification"],"prefix":"10.1109","author":[{"given":"Kaoru","family":"Yamashita","sequence":"first","affiliation":[{"name":"Kyoto Institute of Technology – KIT Matsugasaki,Graduate School of Science and Technology,Kyoto,Japan,606-8585"}]},{"given":"Hikaru","family":"Hibino","sequence":"additional","affiliation":[{"name":"Kyoto Institute of Technology – KIT Matsugasaki,Graduate School of Science and Technology,Kyoto,Japan,606-8585"}]},{"given":"Tomoki","family":"Nishioka","sequence":"additional","affiliation":[{"name":"Kyoto Institute of Technology – KIT Matsugasaki,Graduate School of Science and Technology,Kyoto,Japan,606-8585"}]},{"given":"Minoru","family":"Noda","sequence":"additional","affiliation":[{"name":"Kyoto Institute of Technology – KIT Matsugasaki,Graduate School of Science and Technology,Kyoto,Japan,606-8585"}]},{"given":"Paul","family":"Muralt","sequence":"additional","affiliation":[{"name":"Swiss Federal Institute of Technology in Lausanne – EPFL,Electroceramics Thin Film Group,Lausanne,Switzerland,1015"}]}],"member":"263","reference":[{"key":"ref4","article-title":"Multi-frequency ultrasonic measurement for ghost suppression with a sparse phased array by frequency-tunable microsensors","author":"yamashita","year":"2012","journal-title":"Wacv 2018"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2005.11.001"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1080\/00150193.2010.485014"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.3390\/proceedings2130835"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4615-5339-7_114"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2016.7758254"},{"key":"ref7","article-title":"Stress control on sol-gel PZT prepared for highly sensitive diaphragm structures of ultrasonic microsensors","author":"yamashita","year":"2016","journal-title":"Proc ISAF 2016 (ISAF\/ECAPD\/PFM)"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/58.655620"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.2322\/jjsass1953.16.182"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.04.048"}],"event":{"name":"2019 IEEE SENSORS","start":{"date-parts":[[2019,10,27]]},"location":"Montreal, QC, Canada","end":{"date-parts":[[2019,10,30]]}},"container-title":["2019 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8949872\/8956486\/08956622.pdf?arnumber=8956622","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,9,1]],"date-time":"2025-09-01T19:21:36Z","timestamp":1756754496000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8956622\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,10]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/sensors43011.2019.8956622","relation":{},"subject":[],"published":{"date-parts":[[2019,10]]}}}