{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:13:40Z","timestamp":1740100420924,"version":"3.37.3"},"reference-count":16,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,10,31]],"date-time":"2021-10-31T00:00:00Z","timestamp":1635638400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,10,31]],"date-time":"2021-10-31T00:00:00Z","timestamp":1635638400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012692","name":"K. C. Wong Education Foundation","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100012692","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,10,31]]},"DOI":"10.1109\/sensors47087.2021.9639481","type":"proceedings-article","created":{"date-parts":[[2021,12,17]],"date-time":"2021-12-17T20:35:41Z","timestamp":1639773341000},"page":"1-4","source":"Crossref","is-referenced-by-count":2,"title":["Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane"],"prefix":"10.1109","author":[{"given":"Xin","family":"Ma","sequence":"first","affiliation":[{"name":"Xi’an Jiaotong University,State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering,Xi’an,China,710049"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qi","family":"Zhang","sequence":"additional","affiliation":[{"name":"Xi’an Jiaotong University,State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering,Xi’an,China,710049"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Guo","sequence":"additional","affiliation":[{"name":"Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences,Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo,China,315201"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yulong","family":"Zhao","sequence":"additional","affiliation":[{"name":"Xi’an Jiaotong University,State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering,Xi’an,China,710049"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aiying","family":"Wang","sequence":"additional","affiliation":[{"name":"Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences,Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo,China,315201"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.7b17439"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.diamond.2012.04.004"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.apsusc.2005.12.046"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/7\/S12"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1063\/1.5096225"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.61.14095"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2019.111700"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1007\/s11465-017-0447-9"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2020.112372"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.07.006"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2009.2013612"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.4866028"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1021\/nl401352k"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201603526"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2016.2628781"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2015.03.008"}],"event":{"name":"2021 IEEE Sensors","start":{"date-parts":[[2021,10,31]]},"location":"Sydney, Australia","end":{"date-parts":[[2021,11,3]]}},"container-title":["2021 IEEE Sensors"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9639447\/9639235\/09639481.pdf?arnumber=9639481","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,23]],"date-time":"2022-05-23T21:28:17Z","timestamp":1653341297000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9639481\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,10,31]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/sensors47087.2021.9639481","relation":{},"subject":[],"published":{"date-parts":[[2021,10,31]]}}}