{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T13:44:40Z","timestamp":1730295880088,"version":"3.28.0"},"reference-count":11,"publisher":"IEEE","license":[{"start":{"date-parts":[[2020,10,25]],"date-time":"2020-10-25T00:00:00Z","timestamp":1603584000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2020,10,25]],"date-time":"2020-10-25T00:00:00Z","timestamp":1603584000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2020,10,25]],"date-time":"2020-10-25T00:00:00Z","timestamp":1603584000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2020,10,25]]},"DOI":"10.1109\/sensors47125.2020.9278888","type":"proceedings-article","created":{"date-parts":[[2020,12,9]],"date-time":"2020-12-09T22:29:29Z","timestamp":1607552969000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["Commercial Production of Low-k PZT film using Sputtering Method"],"prefix":"10.1109","author":[{"given":"Mario","family":"Kiuchi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ryoma","family":"Miyake","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shinya","family":"Yoshida","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shuji","family":"Tanaka","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tsuyoshi","family":"Takemoto","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yukitaka","family":"Yamaguchi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kenji","family":"Komaki","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.matchemphys.2004.09.050"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/S0957-4158(03)00066-7"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.7567\/JJAP.56.127201"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1023\/B:JECR.0000033998.72845.51"},{"year":"0","key":"ref11"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.06.018"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.121373"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1063\/1.4993908"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"151","DOI":"10.1016\/S0924-4247(03)00006-2","article-title":"Analytical analysis of a circular PZT actuator for valveless micropumps","volume":"104","author":"li","year":"2003","journal-title":"Sensors Actuators A"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(03)00234-6"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(95)00994-9"}],"event":{"name":"2020 IEEE SENSORS","start":{"date-parts":[[2020,10,25]]},"location":"Rotterdam, Netherlands","end":{"date-parts":[[2020,10,28]]}},"container-title":["2020 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9278450\/9278578\/09278888.pdf?arnumber=9278888","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,30]],"date-time":"2022-06-30T11:16:38Z","timestamp":1656587798000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9278888\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,10,25]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/sensors47125.2020.9278888","relation":{},"subject":[],"published":{"date-parts":[[2020,10,25]]}}}