{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,24]],"date-time":"2025-06-24T07:10:29Z","timestamp":1750749029126,"version":"3.38.0"},"reference-count":16,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,10,29]],"date-time":"2023-10-29T00:00:00Z","timestamp":1698537600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,10,29]],"date-time":"2023-10-29T00:00:00Z","timestamp":1698537600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Science Foundation of China","doi-asserted-by":"publisher","award":["62173196"],"award-info":[{"award-number":["62173196"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,10,29]]},"DOI":"10.1109\/sensors56945.2023.10325284","type":"proceedings-article","created":{"date-parts":[[2023,11,28]],"date-time":"2023-11-28T19:02:53Z","timestamp":1701198173000},"page":"1-4","source":"Crossref","is-referenced-by-count":4,"title":["Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach Structure"],"prefix":"10.1109","author":[{"given":"Yukun","family":"Ma","sequence":"first","affiliation":[{"name":"Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shaohang","family":"Wang","sequence":"additional","affiliation":[{"name":"Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenyi","family":"Xu","sequence":"additional","affiliation":[{"name":"Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fengtian","family":"Han","sequence":"additional","affiliation":[{"name":"Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1201\/9781003338826"},{"key":"ref2","first-page":"1043","article-title":"The silicon oscillating accelerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications","volume-title":"Proceedings of the 61 st Annual Meeting of the Institute of Navigation","author":"Hopkins"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2319196"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1038\/nature17397"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.3390\/s19183979"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2018.2843781"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2017.7863328"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/MEMS49605.2023.10052540"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.3390\/mi12010026"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2016.7808649"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969582"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.3390\/s19071544"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/ICEPT56209.2022.9873218"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2023.3255415"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2022.3199486"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2021.3077633"}],"event":{"name":"2023 IEEE SENSORS","start":{"date-parts":[[2023,10,29]]},"location":"Vienna, Austria","end":{"date-parts":[[2023,11,1]]}},"container-title":["2023 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10324456\/10324848\/10325284.pdf?arnumber=10325284","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,2,28]],"date-time":"2025-02-28T18:37:59Z","timestamp":1740767879000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10325284\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,10,29]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/sensors56945.2023.10325284","relation":{},"subject":[],"published":{"date-parts":[[2023,10,29]]}}}