{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,21]],"date-time":"2025-08-21T17:33:08Z","timestamp":1755797588847,"version":"3.30.2"},"reference-count":10,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,10,20]],"date-time":"2024-10-20T00:00:00Z","timestamp":1729382400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,10,20]],"date-time":"2024-10-20T00:00:00Z","timestamp":1729382400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,10,20]]},"DOI":"10.1109\/sensors60989.2024.10784701","type":"proceedings-article","created":{"date-parts":[[2024,12,17]],"date-time":"2024-12-17T19:07:24Z","timestamp":1734462444000},"page":"1-4","source":"Crossref","is-referenced-by-count":1,"title":["A Wafer-level Package Design with Symmetrical Out-plane Electrodes for 3D-MEMS Devices"],"prefix":"10.1109","author":[{"given":"Jianjun","family":"Ma","sequence":"first","affiliation":[{"name":"Tsinghua University,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jincui","family":"Cui","sequence":"additional","affiliation":[{"name":"Tsinghua University,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shuangxin","family":"Huang","sequence":"additional","affiliation":[{"name":"School of Economics and Management, University of Chinese Academy of Sciences,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qilin","family":"Cai","sequence":"additional","affiliation":[{"name":"Yibin Research Institute, Southwest Jiaotong University,Sichuan,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qi","family":"Wei","sequence":"additional","affiliation":[{"name":"Tsinghua University,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bin","family":"Zhou","sequence":"additional","affiliation":[{"name":"Tsinghua University,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Tsinghua University,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3078375"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1115\/IPACK2005-73369"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/PLANS53410.2023.10140000"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TCPMT.2012.2205928"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/IITC.2009.5090361"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/INERTIAL60399.2024.10502059"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCPMT.2017.2780102"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/ICEPT.2005.1564660"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ECTC.2011.5898726"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1063\/1.113943"}],"event":{"name":"2024 IEEE SENSORS","start":{"date-parts":[[2024,10,20]]},"location":"Kobe, Japan","end":{"date-parts":[[2024,10,23]]}},"container-title":["2024 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10783834\/10784457\/10784701.pdf?arnumber=10784701","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,12,18]],"date-time":"2024-12-18T07:25:29Z","timestamp":1734506729000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10784701\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,10,20]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/sensors60989.2024.10784701","relation":{},"subject":[],"published":{"date-parts":[[2024,10,20]]}}}