{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T13:56:26Z","timestamp":1730296586341,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/sii.2012.6427389","type":"proceedings-article","created":{"date-parts":[[2013,2,8]],"date-time":"2013-02-08T22:05:07Z","timestamp":1360361107000},"page":"686-691","source":"Crossref","is-referenced-by-count":2,"title":["Design and fabrication of a multi-degree-of-freedom microactuator using symmetric piezoelectric pusher element and its applications"],"prefix":"10.1109","author":[{"given":"S.C.","family":"Shen","sequence":"first","affiliation":[]},{"given":"S. J.","family":"Chang","sequence":"additional","affiliation":[]},{"given":"C. T.","family":"Pan","sequence":"additional","affiliation":[]},{"given":"J.C.","family":"Huang","sequence":"additional","affiliation":[]},{"given":"P.C.","family":"Tsai","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"13","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1109\/JMEMS.2008.2009847","article-title":"Manufacture of integrated 3-D Structure Nozzle Plate using Micro-injection molding for 1200dpi Inkjet Printhead","volume":"18","author":"shen","year":"2009","journal-title":"IEEE\/ASME J Microelectromech Syst"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.45.6011"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2006.05.191"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/ICAR.1991.240476"},{"journal-title":"Scaling Issues and Design of MEMS","year":"2008","author":"baglio","key":"2"},{"key":"1","doi-asserted-by":"crossref","first-page":"301","DOI":"10.1007\/s10832-007-9196-1","article-title":"Piezoelectric actuators 2006 expansion from IT\/robotics to ecological\/energy applications","volume":"20","author":"uchino","year":"2008","journal-title":"Journal of Electroceram"},{"journal-title":"Ceramic Motor","year":"1995","author":"ltd","key":"10"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2004.1417995"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/AIM.2003.1225532"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2008.07.022"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/3516.974864"},{"key":"9","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1299\/kikaic.73.577","article-title":"A multi-degree of freedom ultrasonic motor using single-phase-driven vibrators","volume":"73","author":"otokawa","year":"2007","journal-title":"Transactions of the Japan Society of Mechanical Engineers-part C"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2005.1561674"}],"event":{"name":"2012 IEEE\/SICE International Symposium on System Integration (SII 2012)","start":{"date-parts":[[2012,12,16]]},"location":"Fukuoka","end":{"date-parts":[[2012,12,18]]}},"container-title":["2012 IEEE\/SICE International Symposium on System Integration (SII)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6416132\/6426928\/06427389.pdf?arnumber=6427389","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,2,3]],"date-time":"2020-02-03T16:10:56Z","timestamp":1580746256000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/6427389\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/sii.2012.6427389","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}