{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,16]],"date-time":"2026-05-16T12:20:59Z","timestamp":1778934059176,"version":"3.51.4"},"reference-count":42,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"2","license":[{"start":{"date-parts":[[2013,4,1]],"date-time":"2013-04-01T00:00:00Z","timestamp":1364774400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Automat. Sci. Eng."],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/tase.2012.2221087","type":"journal-article","created":{"date-parts":[[2012,12,5]],"date-time":"2012-12-05T23:14:35Z","timestamp":1354749275000},"page":"354-364","source":"Crossref","is-referenced-by-count":66,"title":["Adaptive Dispatching Rule for Semiconductor Wafer Fabrication Facility"],"prefix":"10.1109","volume":"10","author":[{"given":"Li","family":"Li","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zijin","family":"Sun","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fei","family":"Qiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/TSMCC.2007.897321"},{"key":"ref38","doi-asserted-by":"crossref","first-page":"1120","DOI":"10.1109\/TEVC.2009.2021465","article-title":"Frankenstein's PSO: A composite particle swarm optimization algorithm","volume":"13","author":"montes","year":"2009","journal-title":"IEEE Trans Evol Comput"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2009.2021462"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2008.4529060"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2007.905991"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2001211"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-008-1462-0"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1080\/0020754031000118099"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1080\/09537280500213757"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijpe.2007.04.008"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2199338"},{"key":"ref40","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1177\/0142331208095622","article-title":"Intelligent token Petri nets for modelling and control of reconfigurable automated manufacturing systems with dynamical changes","volume":"33","author":"wu","year":"2011","journal-title":"Trans Inst Meas Control"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2012.2192476"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046736"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2009.2039243"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1002\/asjc.183"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1109\/TASE.2008.2008633","article-title":"A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis","volume":"7","author":"wu","year":"2010","journal-title":"IEEE Trans Autom Sci Eng"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2160452"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2178023"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046891"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2007.375089"},{"key":"ref4","first-page":"144","article-title":"Dynamic wet-furnace dispatching\/scheduling in wafer fab","author":"ham","year":"2006","journal-title":"A Smc Proc"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1080\/00207540701324168"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1080\/00207540601085919"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1142\/S0960313102000370"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/ICARCV.2004.1468875"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.cor.2004.04.001"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/SMTW.2004.1393705"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/COASE.2007.4341781"},{"key":"ref2","first-page":"75","article-title":"Dynamic photo stepper dispatching\/scheduling in wafer fabrication","author":"ham","year":"2005","journal-title":"IEEE Semi Int Semicond Manuf Symp Proc"},{"key":"ref9","first-page":"1","article-title":"Petri net modeling and cycle time analysis of dual-arm cluster tools with wafer revisiting","author":"wu","year":"2012","journal-title":"IEEE Trans Syst Man Cybern A Syst Humans"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1080\/00207540701805638"},{"key":"ref20","doi-asserted-by":"crossref","first-page":"2823","DOI":"10.1080\/00207540701491090","article-title":"Effective overhead hoist transport dispatching based on the Hungarian algorithm for a large semiconductor FAB","volume":"47","author":"kim","year":"2009","journal-title":"Int J Prod Res"},{"key":"ref22","doi-asserted-by":"crossref","first-page":"384","DOI":"10.1109\/66.705373","article-title":"Scheduling of semiconductor test facility via Petri nets and hybrid heuristic search","volume":"11","author":"xiong","year":"1998","journal-title":"IEEE Trans Semicond Manuf"},{"key":"ref21","first-page":"1927","article-title":"The heuristic dispatching method of automatic material handling system in 300 mm semiconductor fabrication","volume":"5","author":"wang","year":"2009","journal-title":"Int J Innov Comput I"},{"key":"ref42","author":"zhou","year":"1998","journal-title":"Modeling Simulation and Control of Flexible Manufacturing Systems A Petri Net Approach"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1007\/s00291-006-0046-3"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1109\/66.705370"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1080\/00207540600863738"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/ICCIE.2009.5223916"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1016\/j.cor.2007.11.006"}],"container-title":["IEEE Transactions on Automation Science and Engineering"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8856\/6493467\/06374713.pdf?arnumber=6374713","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,29]],"date-time":"2021-11-29T20:38:44Z","timestamp":1638218324000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6374713\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":42,"journal-issue":{"issue":"2"},"URL":"https:\/\/doi.org\/10.1109\/tase.2012.2221087","relation":{},"ISSN":["1545-5955","1558-3783"],"issn-type":[{"value":"1545-5955","type":"print"},{"value":"1558-3783","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,4]]}}}