{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,26]],"date-time":"2025-12-26T07:16:01Z","timestamp":1766733361102},"reference-count":33,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"1","license":[{"start":{"date-parts":[[2015,1,1]],"date-time":"2015-01-01T00:00:00Z","timestamp":1420070400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Automat. Sci. Eng."],"published-print":{"date-parts":[[2015,1]]},"DOI":"10.1109\/tase.2014.2360214","type":"journal-article","created":{"date-parts":[[2014,12,31]],"date-time":"2014-12-31T19:43:55Z","timestamp":1420055035000},"page":"75-83","source":"Crossref","is-referenced-by-count":20,"title":["A Sampling Decision System for Virtual Metrology in Semiconductor Manufacturing"],"prefix":"10.1109","volume":"12","author":[{"given":"Daniel","family":"Kurz","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cristina","family":"De Luca","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jurgen","family":"Pilz","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1214\/aos\/1176348885"},{"key":"ref32","author":"colosimo","year":"2007","journal-title":"Bayesian Process Monitoring Control and Optimization"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4899-3432-1"},{"key":"ref30","author":"ehm","year":"2009","journal-title":"Local Proper Scoring Rules"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/CCA.2012.6402409"},{"key":"ref11","article-title":"Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach","author":"susto","year":"2014","journal-title":"Comp Oper Res"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2286498"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2012.6386366"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/CoASE.2013.6653949"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.914373"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1007\/s10044-014-0386-6"},{"key":"ref17","first-page":"57","article-title":"Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing","author":"schirru","year":"2010","journal-title":"Proc Conf Autom Sci Eng"},{"key":"ref18","author":"montgomery","year":"2001","journal-title":"Introduction to Statistical Process Control"},{"key":"ref19","doi-asserted-by":"crossref","DOI":"10.1002\/9780470746684","author":"parmigiani","year":"2009","journal-title":"Decision Theory Principles and Approaches"},{"key":"ref28","author":"gneiting","year":"2008","journal-title":"?Assessing probabilistic forecasts of multivariate quantities with an application to ensemble predictions of surface winds ?"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2009.5155972"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/66.484295"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2007.897275"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/CASE.2011.6042425"},{"key":"ref29","doi-asserted-by":"crossref","DOI":"10.21236\/ADA454827","author":"gneiting","year":"2005","journal-title":"?Probabilistic forecasts calibration and sharpness ?"},{"key":"ref5","first-page":"11614","article-title":"Multilevel kernel methods for virtual metrology in semiconductor manufacturing","author":"schirru","year":"2011","journal-title":"Proc 18th IFAC World Congr"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2010.08.040"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2104372"},{"key":"ref2","first-page":"52","article-title":"Virtual metrology and your technology watch list: Ten things you should know about this emerging technology","volume":"22","author":"weber","year":"2007","journal-title":"Future Fab Int"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.5923\/j.control.20120203.02"},{"key":"ref1","first-page":"1054","article-title":"A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing","author":"lin","year":"2006","journal-title":"Proc IEEE Conf Robot Autom"},{"key":"ref20","author":"bernardo","year":"2000","journal-title":"Bayesian Theory"},{"key":"ref22","author":"held","year":"2008","journal-title":"Methoden der Statistischen Inferenz Likelihood und Bayes"},{"key":"ref21","author":"degroot","year":"1970","journal-title":"Optimal Statistical Decisions"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1137\/1.9780898718461"},{"key":"ref23","author":"bellman","year":"1957","journal-title":"Dynamic Programming"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1214\/aoms\/1177728069"},{"key":"ref25","doi-asserted-by":"crossref","first-page":"369","DOI":"10.1080\/00224065.1997.11979791","article-title":"A practical approach for interpreting multivariate <formula formulatype=\"inline\"><tex Notation=\"TeX\">$T^2$<\/tex> <\/formula> control chart signals","volume":"29","author":"mason","year":"1997","journal-title":"J Qual Tech"}],"container-title":["IEEE Transactions on Automation Science and Engineering"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8856\/7000614\/06920089.pdf?arnumber=6920089","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T16:30:26Z","timestamp":1642005026000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6920089\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,1]]},"references-count":33,"journal-issue":{"issue":"1"},"URL":"https:\/\/doi.org\/10.1109\/tase.2014.2360214","relation":{},"ISSN":["1545-5955","1558-3783"],"issn-type":[{"value":"1545-5955","type":"print"},{"value":"1558-3783","type":"electronic"}],"subject":[],"published":{"date-parts":[[2015,1]]}}}