{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T21:24:53Z","timestamp":1776806693006,"version":"3.51.2"},"reference-count":36,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[2024,10,1]],"date-time":"2024-10-01T00:00:00Z","timestamp":1727740800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2024,10,1]],"date-time":"2024-10-01T00:00:00Z","timestamp":1727740800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,10,1]],"date-time":"2024-10-01T00:00:00Z","timestamp":1727740800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"name":"Humanities and Social Sciences Planned Foundation of the People\u2019s Republic of China (PRC) Ministry of Education","award":["22YJA630088"],"award-info":[{"award-number":["22YJA630088"]}]},{"DOI":"10.13039\/501100006469","name":"Fundo para o Desenvolvimento das Ciencias e da Tecnologia","doi-asserted-by":"publisher","award":["0047\/2021\/A1"],"award-info":[{"award-number":["0047\/2021\/A1"]}],"id":[{"id":"10.13039\/501100006469","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Automat. Sci. Eng."],"published-print":{"date-parts":[[2024,10]]},"DOI":"10.1109\/tase.2023.3332551","type":"journal-article","created":{"date-parts":[[2023,11,30]],"date-time":"2023-11-30T19:31:21Z","timestamp":1701372681000},"page":"6833-6844","source":"Crossref","is-referenced-by-count":11,"title":["Scheduling of Single-Arm Cluster Tools Handling Multiple Wafer Types Based on Double-Layer Configuration of Processing Modules"],"prefix":"10.1109","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6088-0474","authenticated-orcid":false,"given":"Jufeng","family":"Wang","sequence":"first","affiliation":[{"name":"College of Science, China Jiliang University, Hangzhou, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tingting","family":"Leng","sequence":"additional","affiliation":[{"name":"College of Science, China Jiliang University, Hangzhou, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1792-1714","authenticated-orcid":false,"given":"Chunfeng","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Management, Hangzhou Dianzi University, Hangzhou, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5408-8752","authenticated-orcid":false,"given":"MengChu","family":"Zhou","sequence":"additional","affiliation":[{"name":"Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Side","family":"Zhao","sequence":"additional","affiliation":[{"name":"Lam Research Corporation, Fremont, CA, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2017.2690443"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2015.1113328"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2018.2878653"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JSYST.2019.2963222"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1051\/ro\/2021173"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.asoc.2017.10.034"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2016.03.020"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1080\/00051144.2019.1603264"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1080\/18756891.2016.1204123"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2023.3253471"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.3934\/jimo.2021175"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2017.2755599"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2015.2443107"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2199329"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2021.3061140"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2023.3239198"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2018.2868004"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/JAS.2020.1003150"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2021.3122576"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/66.641483"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.852103"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046736"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.873402"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2199338"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2014.2312823"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2021.3077503"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2018.2811125"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2013.2296855"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2020.2964032"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2015.1035813"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2018.2878063"},{"issue":"9","key":"ref33","first-page":"1171","article-title":"Scheduling for single-armed cluster tools with mixed-processing of multi-variety wafers","volume":"33","author":"Pan","year":"2016","journal-title":"Control Theory Appl."},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2020.3002560"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2007.912716"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2017.2682271"}],"container-title":["IEEE Transactions on Automation Science and Engineering"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8856\/10718645\/10335632.pdf?arnumber=10335632","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,10,21]],"date-time":"2024-10-21T17:29:34Z","timestamp":1729531774000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10335632\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,10]]},"references-count":36,"journal-issue":{"issue":"4"},"URL":"https:\/\/doi.org\/10.1109\/tase.2023.3332551","relation":{},"ISSN":["1545-5955","1558-3783"],"issn-type":[{"value":"1545-5955","type":"print"},{"value":"1558-3783","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,10]]}}}