{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,12]],"date-time":"2025-08-12T22:04:49Z","timestamp":1755036289708,"version":"3.40.4"},"reference-count":53,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100002481","name":"Talent Start Funding of Nanjing Vocational University of Industry Technology","doi-asserted-by":"publisher","award":["YK24-01-01"],"award-info":[{"award-number":["YK24-01-01"]}],"id":[{"id":"10.13039\/501100002481","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52275437"],"award-info":[{"award-number":["52275437"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Special Funding for Jiangsu Province Innovation Support Program","award":["BZ2023058"],"award-info":[{"award-number":["BZ2023058"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Automat. Sci. Eng."],"published-print":{"date-parts":[[2025]]},"DOI":"10.1109\/tase.2025.3532341","type":"journal-article","created":{"date-parts":[[2025,1,20]],"date-time":"2025-01-20T19:12:14Z","timestamp":1737400334000},"page":"13884-13894","source":"Crossref","is-referenced-by-count":1,"title":["MagScanner: A Magnetic Planar <i>XY<\/i> Stage for the Scanning Probe-Based Surface Profilometer"],"prefix":"10.1109","volume":"22","author":[{"given":"Rongjing","family":"Zhou","sequence":"first","affiliation":[{"name":"School of Mechanical Engineering, Nanjing Vocational University of Industry Technology, Nanjing, Jiangsu, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8412-6978","authenticated-orcid":false,"given":"Yan-Ning","family":"Fang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4522-2961","authenticated-orcid":false,"given":"Lingbao","family":"Kong","sequence":"additional","affiliation":[{"name":"Department of Optical Science and Engineering, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3194-6731","authenticated-orcid":false,"given":"Li-Min","family":"Zhu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5363-9797","authenticated-orcid":false,"given":"Zhiwei","family":"Zhu","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, China"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2019.05.005"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2020.06.001"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.34133\/2022\/9758460"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.34133\/cbsystems.0061"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2015.08.011"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1117\/12.545704"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2012.09.010"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1364\/OE.26.030724"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2022.06.011"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2021.04.072"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2021.11.015"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1063\/1.4984124"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1117\/12.2602148"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1364\/AOMS.2015.JT5A.6"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1364\/AO.399760"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1364\/AO.428374"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2022.3151959"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1364\/OE.440654"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2021.04.064"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TNANO.2013.2292610"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2007.902953"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.3020047"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2024.3357908"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2022.3145670"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2022.05.012"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2885716"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/S0007-8506(07)60128-0"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2022.3201303"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2842735"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2018.2866272"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2012.01.008"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2021.3105683"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2024.3405195"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2022.109304"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2024.3366217"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3060635"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2024.3354943"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1364\/AO.49.003259"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2015.2509905"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2011.2119323"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2021.104343"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2019.103588"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmecsci.2024.109425"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.106873"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2018.04.008"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-016-2854-y"},{"key":"ref47","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2009.2014130"},{"key":"ref48","doi-asserted-by":"publisher","DOI":"10.1063\/1.4725525"},{"key":"ref49","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2020.2998773"},{"key":"ref50","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2004.04.005"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2022.01.003"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.23919\/ACC.2004.1383692"},{"volume-title":"Measurement Systems: Application and Design","year":"2007","author":"Doebelin","key":"ref53"}],"container-title":["IEEE Transactions on Automation Science and Engineering"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/8856\/10839176\/10848198.pdf?arnumber=10848198","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,4,25]],"date-time":"2025-04-25T17:43:33Z","timestamp":1745603013000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10848198\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025]]},"references-count":53,"URL":"https:\/\/doi.org\/10.1109\/tase.2025.3532341","relation":{},"ISSN":["1545-5955","1558-3783"],"issn-type":[{"type":"print","value":"1545-5955"},{"type":"electronic","value":"1558-3783"}],"subject":[],"published":{"date-parts":[[2025]]}}}