{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,28]],"date-time":"2026-04-28T15:20:14Z","timestamp":1777389614123,"version":"3.51.4"},"reference-count":35,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"name":"National Key Research and Development Program of China","award":["2023YFF0721400"],"award-info":[{"award-number":["2023YFF0721400"]}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62273247"],"award-info":[{"award-number":["62273247"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Automat. Sci. Eng."],"published-print":{"date-parts":[[2025]]},"DOI":"10.1109\/tase.2025.3564616","type":"journal-article","created":{"date-parts":[[2025,4,29]],"date-time":"2025-04-29T17:34:00Z","timestamp":1745948040000},"page":"14967-14975","source":"Crossref","is-referenced-by-count":5,"title":["Automated Nanomanipulation for Repairing Defects on Nanoimprint Lithography Masters"],"prefix":"10.1109","volume":"22","author":[{"given":"Siyuan","family":"Meng","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0000-8997-7923","authenticated-orcid":false,"given":"Jiankang","family":"Jiang","sequence":"additional","affiliation":[{"name":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, Jiangsu, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fubo","family":"Wang","sequence":"additional","affiliation":[{"name":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, Jiangsu, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junhui","family":"Zhu","sequence":"additional","affiliation":[{"name":"School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qianjun","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yong","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1211-6444","authenticated-orcid":false,"given":"Wei","family":"Dong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Changhai","family":"Ru","sequence":"additional","affiliation":[{"name":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, Jiangsu, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.nanoen.2020.105090"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202212641"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1021\/acssensors.0c02704"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/SSI56489.2022.9901408"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.mattod.2021.04.019"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.2c02339"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1007\/s11465-022-0717-z"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1039\/D0CS00706D"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202103902"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1002\/smll.202470010"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.0c12126"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2021.3066549"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1039\/D3NR02122J"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.energy.2024.133882"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2022.3228809"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.1c04075"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1002\/anie.202013011"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/j.corsci.2022.110543"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2011.2166162"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202110625"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2023.3273680"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TNANO.2010.2065236"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2021.3135888"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1039\/D2NR04876K"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2021.3065436"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2022.3146486"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.carbon.2022.08.052"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2023.3279895"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemrev.0c00999"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1021\/acs.analchem.0c01148"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1007\/s11831-021-09652-0"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.3390\/mi13112008"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2021.3125825"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2023.01.014"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2018.2871052"}],"container-title":["IEEE Transactions on Automation Science and Engineering"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/8856\/10839176\/10977966.pdf?arnumber=10977966","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,5,12]],"date-time":"2025-05-12T17:46:31Z","timestamp":1747071991000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10977966\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025]]},"references-count":35,"URL":"https:\/\/doi.org\/10.1109\/tase.2025.3564616","relation":{},"ISSN":["1545-5955","1558-3783"],"issn-type":[{"value":"1545-5955","type":"print"},{"value":"1558-3783","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025]]}}}