{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T20:32:46Z","timestamp":1759177966799},"reference-count":19,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[1985,10,1]],"date-time":"1985-10-01T00:00:00Z","timestamp":496972800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst."],"published-print":{"date-parts":[[1985,10]]},"DOI":"10.1109\/tcad.1985.1270135","type":"journal-article","created":{"date-parts":[[2004,4,28]],"date-time":"2004-04-28T20:28:59Z","timestamp":1083184139000},"page":"374-383","source":"Crossref","is-referenced-by-count":10,"title":["Monte Carlo Calculation of One- and Two-Dimensional Particle and Damage Distributions for Ion-Implanted Dopants in Silicon"],"prefix":"10.1109","volume":"4","author":[{"given":"J.","family":"Albers","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/0029-554X(80)90440-1"},{"key":"ref11","doi-asserted-by":"crossref","DOI":"10.2172\/4074774","author":"robinson","year":"1970","journal-title":"Tables of classical scattering integrals"},{"key":"ref12","first-page":"133","article-title":"Theorie der Streuung schneller galadener Teilchen I Einzelstreuung am abgeschirmten Coulomb-Feld","volume":"a2","author":"moliere","year":"1947","journal-title":"Z Nat"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.15.2458"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/0029-5493(75)90035-7"},{"key":"ref15","first-page":"1","article-title":"Stopping power of electron gas and equipartition rule","volume":"34","author":"lindhard","year":"1964","journal-title":"Mat -Fys Medd K Dan Vidensk Selsk"},{"key":"ref16","first-page":"1517","article-title":"A quantitative interpretation of the mean electron excitation energy in atomic collisions","volume":"36","author":"firsov","year":"1959","journal-title":"Soviet Physics JETP"},{"key":"ref17","volume":"2","author":"biersack","year":"1975","journal-title":"Atomic Collisions in Solids"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1139\/p68-070"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.173.454"},{"key":"ref4","author":"gibbons","year":"1975","journal-title":"Projected Range Statistics"},{"key":"ref3","first-page":"1","article-title":"Range concepts and heavy ion ranges","volume":"33","author":"lindhard","year":"1963","journal-title":"Mat -Fys Medd K Dan Vidensk Selsk"},{"key":"ref6","author":"winterbon","year":"1976","journal-title":"Computing moments of implanted-ion range and energy distributions"},{"key":"ref5","doi-asserted-by":"crossref","DOI":"10.1007\/978-1-4757-5612-8","author":"winterbon","year":"1975","journal-title":"Ion Implantation Range and Energy Deposition Distributions vol 2 - Low Incident Ion Energies"},{"key":"ref8","first-page":"1","article-title":"Spatial distribution of energy deposited by atomic particles in elastic collisions","volume":"37","author":"winterbon","year":"1970","journal-title":"Mat -Fys Medd K Dan Vidensk Selsk"},{"key":"ref7","article-title":"Implantation of boron in silicon","author":"hofker","year":"1975","journal-title":"Philips Res Rep"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/0301-0104(73)85001-3"},{"key":"ref1","volume":"viib","author":"hynes","year":"1973","journal-title":"Mathematical Methods"},{"key":"ref9","author":"robinson","year":"1984","journal-title":"MARLOWE binary collision cascade simulation program version 12"}],"container-title":["IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/43\/28434\/01270135.pdf?arnumber=1270135","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,29]],"date-time":"2021-11-29T15:39:42Z","timestamp":1638200382000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1270135\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1985,10]]},"references-count":19,"journal-issue":{"issue":"4","published-print":{"date-parts":[[1985,10]]}},"URL":"https:\/\/doi.org\/10.1109\/tcad.1985.1270135","relation":{},"ISSN":["0278-0070"],"issn-type":[{"value":"0278-0070","type":"print"}],"subject":[],"published":{"date-parts":[[1985,10]]}}}