{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,8]],"date-time":"2025-11-08T12:30:31Z","timestamp":1762605031067},"reference-count":18,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[1985,10,1]],"date-time":"1985-10-01T00:00:00Z","timestamp":496972800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst."],"published-print":{"date-parts":[[1985,10]]},"DOI":"10.1109\/tcad.1985.1270136","type":"journal-article","created":{"date-parts":[[2004,4,29]],"date-time":"2004-04-29T00:28:59Z","timestamp":1083198539000},"page":"384-397","source":"Crossref","is-referenced-by-count":47,"title":["Simulation of Critical IC-Fabrication Steps"],"prefix":"10.1109","volume":"4","author":[{"given":"P.","family":"Pichler","sequence":"first","affiliation":[]},{"given":"W.","family":"Jungling","sequence":"additional","affiliation":[]},{"given":"S.","family":"Selberherr","sequence":"additional","affiliation":[]},{"given":"E.","family":"Guerrero","sequence":"additional","affiliation":[]},{"given":"H.P.","family":"Potzl","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","author":"knuth","year":"0","journal-title":"Fundamental Algorithms"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1149\/1.2127563"},{"key":"ref12","first-page":"1","article-title":"Range concepts and heavy ion ranges","volume":"33","author":"lindhard","year":"1963","journal-title":"Mater Fys Medd Vid Selsk"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1137\/0717064"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1002\/pssa.2210390228"},{"key":"ref15","first-page":"1","article-title":"Implantation and diffusion models for process simulation","author":"ryssel","year":"1983","journal-title":"Proc VLSI Process and Device Modeling"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-7091-8752-4"},{"key":"ref17","first-page":"275","article-title":"MINIMOS?A program package to facilitate MOS device design and analysis","author":"selberherr","year":"1979","journal-title":"Proc ?ASECODE IV Conf"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.1984.1270057"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/PROC.1972.8562"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1007\/BF01415015"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1983.21261"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1007\/BF01406969"},{"key":"ref8","first-page":"187","volume":"68","author":"gear","year":"1968","journal-title":"Information Processing"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.11.134"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/0029-554X(81)90688-1"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1145\/321607.321609"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1137\/0904045"}],"container-title":["IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/43\/28434\/01270136.pdf?arnumber=1270136","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,29]],"date-time":"2021-11-29T20:39:42Z","timestamp":1638218382000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1270136\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1985,10]]},"references-count":18,"journal-issue":{"issue":"4","published-print":{"date-parts":[[1985,10]]}},"URL":"https:\/\/doi.org\/10.1109\/tcad.1985.1270136","relation":{},"ISSN":["0278-0070"],"issn-type":[{"value":"0278-0070","type":"print"}],"subject":[],"published":{"date-parts":[[1985,10]]}}}