{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,7,5]],"date-time":"2024-07-05T19:15:01Z","timestamp":1720206901471},"reference-count":25,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[1985,10,1]],"date-time":"1985-10-01T00:00:00Z","timestamp":496972800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst."],"published-print":{"date-parts":[[1985,10]]},"DOI":"10.1109\/tcad.1985.1270140","type":"journal-article","created":{"date-parts":[[2004,4,29]],"date-time":"2004-04-29T00:28:59Z","timestamp":1083198539000},"page":"421-430","source":"Crossref","is-referenced-by-count":28,"title":["COMPOSITE -- A Complete Modeling Program of Silicon Technology"],"prefix":"10.1109","volume":"4","author":[{"given":"J.","family":"Lorenz","sequence":"first","affiliation":[{"name":"Fraunhofer-Arbeitgsgruppe fur Integrierte Schaltungen (AIS), Erlangen, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J.","family":"Pelka","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"H.","family":"Ryssel","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Sachs","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Seidl","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M.","family":"Svoboda","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1002\/j.1538-7305.1980.tb02992.x"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"574","DOI":"10.1109\/T-ED.1981.20385","article-title":"two-dimensional computer simulation models for moslsi fabrication processes","volume":"28","author":"taniguchi","year":"1981","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref12","doi-asserted-by":"crossref","first-page":"717","DOI":"10.1109\/T-ED.1979.19482","article-title":"a general simulator for vlsi lithography and etching processes: part i—application to projection lithography","volume":"26","author":"oldham","year":"1979","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref13","doi-asserted-by":"crossref","first-page":"255","DOI":"10.1109\/IEDM.1983.190489","article-title":"simpl-1 (simulated profiles from the layout-version 1)","author":"grimm","year":"1983","journal-title":"1983 International Electron Devices Meeting"},{"key":"ref14","article-title":"Kgl. Danske Videnskab., Selskab.","volume":"33","author":"lindhard","year":"1963","journal-title":"Mat Phys Medd"},{"key":"ref15","author":"hofker","year":"1975","journal-title":"Philips Res Repts"},{"key":"ref16","year":"0"},{"key":"ref17","year":"0"},{"key":"ref18","author":"kr\ufffdger","year":"0","journal-title":"private communication"},{"key":"ref19","article-title":"Numerical conformal mapping for treatment of geometry problems in process simulation","author":"seidl","year":"1984","journal-title":"IEEE-SIAM Conf on Numerical Simulation of VLSI-Devices"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"336","DOI":"10.1109\/T-ED.1982.20704","article-title":"process design using two-dimensional process and device simulators","volume":"29","author":"chin","year":"1982","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1149\/1.2134258"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1007\/BF00624718"},{"key":"ref5","doi-asserted-by":"crossref","first-page":"986","DOI":"10.1109\/T-ED.1983.21251","article-title":"a comprehensive two-dimensional vlsi process simulation program, biceps","volume":"30","author":"penumalli","year":"1983","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"216","DOI":"10.1109\/T-ED.1982.20687","article-title":"recipe—a two-dimensional vlsi process modeling program","volume":"29","author":"smith","year":"1982","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1980.20060"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"1484","DOI":"10.1109\/T-ED.1980.20061","article-title":"simulation of doping processes","volume":"27","author":"ryssel","year":"1980","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref9","doi-asserted-by":"crossref","first-page":"1004","DOI":"10.1109\/T-ED.1983.21254","article-title":"fedss—finite-element diffusion-simulation system","volume":"30","author":"salsburg","year":"1983","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref1","doi-asserted-by":"crossref","first-page":"490","DOI":"10.1109\/T-ED.1979.19452","article-title":"models for computer simulation of complete ic fabrication process","volume":"26","author":"antoniadis","year":"1979","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref20","author":"young","year":"1972","journal-title":"Iterative Solutions of Large Linear Systems"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1149\/1.2127530"},{"key":"ref21","first-page":"1136","volume":"ed 28","author":"lee","year":"1981","journal-title":"IEEE Trans Electron Devices"},{"key":"ref24","doi-asserted-by":"crossref","first-page":"491","DOI":"10.1109\/T-ED.1982.20731","article-title":"low-pressure silicon epitaxy","volume":"29","author":"krullmann","year":"1982","journal-title":"IEEE Transactions on Electron Devices"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1149\/1.2124040"},{"key":"ref25","doi-asserted-by":"crossref","DOI":"10.21236\/ADA605808","author":"jewett","year":"1979","journal-title":"A string model etching algorithm"}],"container-title":["IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/43\/28434\/01270140.pdf?arnumber=1270140","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,29]],"date-time":"2021-11-29T20:39:42Z","timestamp":1638218382000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/1270140\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1985,10]]},"references-count":25,"journal-issue":{"issue":"4"},"URL":"https:\/\/doi.org\/10.1109\/tcad.1985.1270140","relation":{},"ISSN":["0278-0070","1937-4151"],"issn-type":[{"value":"0278-0070","type":"print"},{"value":"1937-4151","type":"electronic"}],"subject":[],"published":{"date-parts":[[1985,10]]}}}