{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,11]],"date-time":"2026-03-11T17:02:38Z","timestamp":1773248558466,"version":"3.50.1"},"reference-count":39,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"5","license":[{"start":{"date-parts":[[2019,5,1]],"date-time":"2019-05-01T00:00:00Z","timestamp":1556668800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,5,1]],"date-time":"2019-05-01T00:00:00Z","timestamp":1556668800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,5,1]],"date-time":"2019-05-01T00:00:00Z","timestamp":1556668800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["2015R1A2A2A01008037"],"award-info":[{"award-number":["2015R1A2A2A01008037"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst."],"published-print":{"date-parts":[[2019,5]]},"DOI":"10.1109\/tcad.2018.2824255","type":"journal-article","created":{"date-parts":[[2018,4,6]],"date-time":"2018-04-06T19:18:58Z","timestamp":1523042338000},"page":"938-948","source":"Crossref","is-referenced-by-count":19,"title":["Neural Network Classifier-Based OPC With Imbalanced Training Data"],"prefix":"10.1109","volume":"38","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4665-5788","authenticated-orcid":false,"given":"Suhyeong","family":"Choi","sequence":"first","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5864-3111","authenticated-orcid":false,"given":"Seongbo","family":"Shim","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7474-9212","authenticated-orcid":false,"given":"Youngsoo","family":"Shin","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1613\/jair.953"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-7908-2604-3_16"},{"key":"ref33","first-page":"86","article-title":"A new facial expression recognition method based on local Gabor filter bank and PCA plus LDA","volume":"11","author":"deng","year":"2005","journal-title":"Int J Inf Technol"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1068\/p2896"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2004.1429421"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1116\/1.4767442"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/72.363438"},{"key":"ref36","doi-asserted-by":"crossref","first-page":"504","DOI":"10.1126\/science.1127647","article-title":"Reducing the dimensionality of data with neural networks","volume":"313","author":"hinton","year":"2006","journal-title":"Science"},{"key":"ref35","doi-asserted-by":"crossref","first-page":"1756","DOI":"10.21437\/Interspeech.2013-436","article-title":"Cross-entropy vs. squared error training: A theoretical and experimental comparison","author":"golik","year":"2013","journal-title":"Proc INTERSPEECH"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1021\/ci010384s"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2016.2629419"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.15.2.021009"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.15.1.013509"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000283"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4471-5634-5_17"},{"key":"ref15","first-page":"21","article-title":"Fast inverse lithography using machine learning","author":"shah","year":"2013","journal-title":"Proc Indian Workshop Mach Learn"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1631\/jzus.C1300357"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1088\/2040-8978\/15\/7\/075708"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1023\/B:APIN.0000033632.42843.17"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/ICPR.2008.4761278"},{"key":"ref28","author":"feldman","year":"2014","journal-title":"Nanolithography The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems"},{"key":"ref4","first-page":"1","article-title":"Pattern-based pre-OPC operation to improve model-based OPC runtime","author":"verma","year":"2014","journal-title":"Proc SPIE Photomask Technol"},{"key":"ref27","year":"2013","journal-title":"PROTEUS"},{"key":"ref3","article-title":"Pattern matching optical proximity correction","author":"simmons","year":"2014"},{"key":"ref6","year":"2017","journal-title":"Personal communication"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.48.06FA05"},{"key":"ref5","first-page":"1","article-title":"Hybrid OPC flow with pattern search and replacement","author":"verma","year":"2015","journal-title":"Proc SPIE Adv Lithography"},{"key":"ref8","first-page":"1","article-title":"Accurate lithography hotspot detection based on PCA-SVM classifier with hierarchical data clustering","author":"gao","year":"2014","journal-title":"Proc SPIE Adv Lithography"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2011.2164537"},{"key":"ref2","year":"2016","journal-title":"Personal communication"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2016.2626304"},{"key":"ref1","first-page":"1","article-title":"Machine learning (ML)-guided OPC using basis functions of polar Fourier transform","author":"choi","year":"2016","journal-title":"Proc SPIE Adv Lithography"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1002\/9781118646106.ch5"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.1.013503"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.16.3.033504"},{"key":"ref24","article-title":"Fourier analysis in polar and spherical coordinates","author":"wang","year":"2008"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.15.4.043504"},{"key":"ref26","year":"2013","journal-title":"Progen"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1117\/12.659449"}],"container-title":["IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/43\/8694033\/08332490.pdf?arnumber=8332490","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,7,5]],"date-time":"2024-07-05T20:21:34Z","timestamp":1720210894000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8332490\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,5]]},"references-count":39,"journal-issue":{"issue":"5"},"URL":"https:\/\/doi.org\/10.1109\/tcad.2018.2824255","relation":{},"ISSN":["0278-0070","1937-4151"],"issn-type":[{"value":"0278-0070","type":"print"},{"value":"1937-4151","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,5]]}}}