{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,29]],"date-time":"2026-03-29T09:10:39Z","timestamp":1774775439667,"version":"3.50.1"},"reference-count":33,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"10","license":[{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"name":"Research Grants Council of Hong Kong, SAR","award":["CUHK14208021"],"award-info":[{"award-number":["CUHK14208021"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst."],"published-print":{"date-parts":[[2023,10]]},"DOI":"10.1109\/tcad.2023.3239559","type":"journal-article","created":{"date-parts":[[2023,1,25]],"date-time":"2023-01-25T18:41:25Z","timestamp":1674672085000},"page":"3402-3411","source":"Crossref","is-referenced-by-count":17,"title":["CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation"],"prefix":"10.1109","volume":"42","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6656-3741","authenticated-orcid":false,"given":"Ziyang","family":"Yu","sequence":"first","affiliation":[{"name":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, SAR"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1220-1363","authenticated-orcid":false,"given":"Peiyu","family":"Liao","sequence":"additional","affiliation":[{"name":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, SAR"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3612-4182","authenticated-orcid":false,"given":"Yuzhe","family":"Ma","sequence":"additional","affiliation":[{"name":"Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6406-4810","authenticated-orcid":false,"given":"Bei","family":"Yu","sequence":"additional","affiliation":[{"name":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, SAR"}]},{"given":"Martin D. F.","family":"Wong","sequence":"additional","affiliation":[{"name":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, SAR"}]}],"member":"263","reference":[{"key":"ref13","author":"kodama","year":"2014","journal-title":"Sub-resolution assist feature arranging method and computer program product and manufacturing method of semiconductor device"},{"key":"ref12","article-title":"Layout optimization with assist features placement by model based rule tables for 2x node random contact","author":"jun","year":"2015","journal-title":"Proc SPIE"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1117\/12.798440"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1117\/12.656691"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1145\/3400302.3415704"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.23919\/DATE51398.2021.9474212"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1117\/12.916731"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD51958.2021.9643464"},{"key":"ref10","author":"wallace","year":"2009","journal-title":"Sub-resolution assist features [J]"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2019.2939329"},{"key":"ref2","first-page":"460","article-title":"Process window enhancement using advanced RET techniques for 20nm contact layer","author":"ping","year":"2014","journal-title":"Proc SPIE"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1364\/OPN.21.6.000026"},{"key":"ref17","author":"shang","year":"2011","journal-title":"Model-based sraf insertion"},{"key":"ref16","author":"ye","year":"2011","journal-title":"System and method for model-based sub-resolution assist feature generation"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1117\/12.801310"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1117\/12.754568"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1117\/12.803801"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1117\/12.804678"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1117\/12.838701"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1117\/12.806657"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2017.2748029"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2019.2943568"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1145\/3316781.3317832"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2019.2928878"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1117\/12.2583694"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1145\/2593069.2593163"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TIP.2006.891332"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2015.2514082"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2017.8203763"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2014.7001358"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2013.6691131"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"1591","DOI":"10.7873\/DATE.2015.1045","article-title":"A Robust Approach for Process Variation Aware Mask Optimization","author":"jian kuang","year":"2015","journal-title":"Design Automation Test in Europe Conference Exhibition (DATE)"},{"key":"ref5","first-page":"81","article-title":"An efficient rule-based OPC approach using a DRC tool for 0.18 ?m ASIC","author":"park","year":"2000","journal-title":"Proc IEEE Int Symp Qual Electron Des (ISQED)"}],"container-title":["IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/43\/10255327\/10025837.pdf?arnumber=10025837","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,10,9]],"date-time":"2023-10-09T19:01:15Z","timestamp":1696878075000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10025837\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,10]]},"references-count":33,"journal-issue":{"issue":"10"},"URL":"https:\/\/doi.org\/10.1109\/tcad.2023.3239559","relation":{},"ISSN":["0278-0070","1937-4151"],"issn-type":[{"value":"0278-0070","type":"print"},{"value":"1937-4151","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,10]]}}}