{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,31]],"date-time":"2026-01-31T02:32:23Z","timestamp":1769826743705,"version":"3.49.0"},"reference-count":27,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"6","license":[{"start":{"date-parts":[[2017,6,1]],"date-time":"2017-06-01T00:00:00Z","timestamp":1496275200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2017,6,1]],"date-time":"2017-06-01T00:00:00Z","timestamp":1496275200000},"content-version":"am","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61473007"],"award-info":[{"award-number":["61473007"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Circuits Syst. I"],"published-print":{"date-parts":[[2017,6]]},"DOI":"10.1109\/tcsi.2016.2645639","type":"journal-article","created":{"date-parts":[[2022,2,1]],"date-time":"2022-02-01T21:53:03Z","timestamp":1643752383000},"page":"1328-1341","source":"Crossref","is-referenced-by-count":10,"title":["A High-Voltage Closed-Loop SC Interface for a \u00b1 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range"],"prefix":"10.1109","volume":"64","author":[{"given":"Meng","family":"Zhao","sequence":"first","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4211-5511","authenticated-orcid":false,"given":"Zhongjian","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Wengao","family":"Lu","sequence":"additional","affiliation":[]},{"given":"Yacong","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Yuze","family":"Niu","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4211-5511","authenticated-orcid":false,"given":"Guangyi","family":"Chen","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","first-page":"288","article-title":"A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-order \n$\\Delta \\Sigma$\n loop","author":"pastre","year":"2009","journal-title":"Proc IEEE ESSCIRC"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"274","DOI":"10.1109\/TCSI.2005.857084","article-title":"Electromechanical \n$\\Delta \\Sigma$\n modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback","volume":"53","author":"wu","year":"2006","journal-title":"IEEE Trans Circuits Syst I Reg Papers"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2012.2236312"},{"key":"ref13","first-page":"320","article-title":"A closed-loop SC interface for a &#x00B1;1.4g accelerometer with 0.33% nonlinearity and 2 \n$\\mu \\text {g}\/\\surd$\n Hz input noise density","author":"yucetas","year":"2010","journal-title":"ISSCC Dig Tech Papers"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2007.904477"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2005.863148"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2008.10.015"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TCSI.2011.2142990"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/16.210197"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2015.2448600"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2012.2191675"},{"key":"ref27","year":"0","journal-title":"MEMS Capacitive Accelerometers SF2006S A\/SF2006SN A Preliminary Data Sheet"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/4.753678"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2006.884864"},{"key":"ref5","first-page":"1","article-title":"An analog closed-loop SC accelerometer interface for a capacitive high-Q sensor element","author":"y\u00fcceta?","year":"2010","journal-title":"Ph D Res Microelec Elec (PRIME)"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2015.2428278"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.07.011"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ISCAS.2015.7168639"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2012.2218721"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(02)00391-6"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSTECH.2008.4558755"},{"key":"ref22","first-page":"1","article-title":"Research on nonlinearity of closed-loop capacitive accelerometer resulting from time-division force feedback","author":"meng","year":"2012","journal-title":"Proc IEEE Int Conf Electron Devices Solid State Circuit (EDSSC)"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSTECH.2008.4558756"},{"key":"ref24","first-page":"614","author":"gregorian","year":"1986","journal-title":"Analog MOS Integrated Circuits for Signal Processing"},{"key":"ref23","volume":"74","author":"schreier","year":"2005","journal-title":"Understanding Delta-Sigma Data Converters"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/5.542410"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TCS.1983.1085282"}],"container-title":["IEEE Transactions on Circuits and Systems I: Regular Papers"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8919\/7934110\/07828008.pdf?arnumber=7828008","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,2,2]],"date-time":"2022-02-02T19:32:05Z","timestamp":1643830325000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7828008\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,6]]},"references-count":27,"journal-issue":{"issue":"6"},"URL":"https:\/\/doi.org\/10.1109\/tcsi.2016.2645639","relation":{},"ISSN":["1549-8328","1558-0806"],"issn-type":[{"value":"1549-8328","type":"print"},{"value":"1558-0806","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,6]]}}}