{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,24]],"date-time":"2025-09-24T08:44:48Z","timestamp":1758703488166,"version":"3.37.3"},"reference-count":32,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"2","license":[{"start":{"date-parts":[[2021,3,1]],"date-time":"2021-03-01T00:00:00Z","timestamp":1614556800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"funder":[{"name":"Impuls II Research Program of the High Tech System Center (HTSC) at the Eindhoven University of Technology"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Contr. Syst. Technol."],"published-print":{"date-parts":[[2021,3]]},"DOI":"10.1109\/tcst.2019.2948592","type":"journal-article","created":{"date-parts":[[2019,11,26]],"date-time":"2019-11-26T21:29:15Z","timestamp":1574803755000},"page":"514-529","source":"Crossref","is-referenced-by-count":5,"title":["Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation"],"prefix":"10.1109","volume":"29","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0767-2710","authenticated-orcid":false,"given":"Daniel W. M.","family":"Veldman","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7778-5913","authenticated-orcid":false,"given":"Rob H. B.","family":"Fey","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3451-7967","authenticated-orcid":false,"given":"Hans","family":"Zwart","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Marc M. J.","family":"van de Wal","sequence":"additional","affiliation":[{"name":"ASML, Veldhoven, DR, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Joris D. B. J.","family":"van den Boom","sequence":"additional","affiliation":[{"name":"ASML, Veldhoven, DR, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5883-6191","authenticated-orcid":false,"given":"Henk","family":"Nijmeijer","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref32","doi-asserted-by":"crossref","first-page":"95","DOI":"10.1007\/978-3-540-78841-6_5","article-title":"Model reduction via proper orthogonal decomposition","volume":"13","author":"pinnau","year":"2008","journal-title":"Model Order Reduction Theory Research Aspects and Applications"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1137\/100819333"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4020-8839-1_3"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/0098-1354(95)00024-0"},{"journal-title":"Optimal Control Systems","year":"2002","author":"naidu","key":"ref11"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1007\/s10589-007-9150-9"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1137\/100815037"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1137\/140959055"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1137\/15M1020745"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1137\/16M1058418"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1142\/S0218202518500586"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2001.946008"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1115\/1.4040705"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1515\/9781400830244"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.23919\/SICEISCS.2018.8330172"},{"key":"ref27","volume":"8","author":"borz\u00ec","year":"2012","journal-title":"Computational Optimization of Systems Governed by Partial Differential Equations"},{"key":"ref3","article-title":"Overlay control for 7 nm technology node and beyond","volume":"10587","author":"aung","year":"2018","journal-title":"Proc SPIE"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/S0005-1098(00)00181-3"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TSP.2002.807002"},{"journal-title":"Multivariable Feedback Control Analysis and Design","year":"2007","author":"skogestad","key":"ref5"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"737","DOI":"10.1109\/TCST.2003.816405","article-title":"Optimal actuator\/sensor placement for nonlinear control of the Kuramoto-Sivashinsky equation","volume":"11","author":"lou","year":"2003","journal-title":"IEEE Trans Control Syst Technol"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2016.2575799"},{"key":"ref2","article-title":"Analysis of wafer heating in 14 nm DUV layers","volume":"9778","author":"subramany","year":"2016","journal-title":"Proc SPIE"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/0045-7949(94)90254-2"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijheatmasstransfer.2018.01.085"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1002\/9781118411285"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1533\/9780857098757.42"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1142\/ASES"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1137\/1.9781611970791"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1017\/CBO9780511804441"},{"journal-title":"The Finite Element Method Its Basis and Fundamentals","year":"2013","author":"zienkiewicz","key":"ref26"},{"journal-title":"Mathematical Programming Theory and Algorithms","year":"1986","author":"minoux","key":"ref25"}],"container-title":["IEEE Transactions on Control Systems Technology"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/87\/9352216\/08913681.pdf?arnumber=8913681","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,26]],"date-time":"2022-01-26T16:14:21Z","timestamp":1643213661000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8913681\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,3]]},"references-count":32,"journal-issue":{"issue":"2"},"URL":"https:\/\/doi.org\/10.1109\/tcst.2019.2948592","relation":{},"ISSN":["1063-6536","1558-0865","2374-0159"],"issn-type":[{"type":"print","value":"1063-6536"},{"type":"electronic","value":"1558-0865"},{"type":"electronic","value":"2374-0159"}],"subject":[],"published":{"date-parts":[[2021,3]]}}}