{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T15:11:05Z","timestamp":1730301065607,"version":"3.28.0"},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/test.2002.1041791","type":"proceedings-article","created":{"date-parts":[[2003,6,25]],"date-time":"2003-06-25T19:36:53Z","timestamp":1056569813000},"page":"424-429","source":"Crossref","is-referenced-by-count":13,"title":["Low contact force probing on copper electrodes"],"prefix":"10.1109","author":[{"given":"K.","family":"Kataoka","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"Itoh","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"K.","family":"Okumura","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"Suga","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"3","DOI":"10.1109\/84.749401"},{"doi-asserted-by":"publisher","key":"2","DOI":"10.1109\/96.365506"},{"key":"10","first-page":"244","article-title":"MEMS IC test probe utilizing fritting contacts","author":"itoh","year":"0","journal-title":"Proc of Design Test Integration and Packaging of MEMS\/MOEMS Paris France 2000"},{"doi-asserted-by":"publisher","key":"1","DOI":"10.1109\/MCMC.1994.292521"},{"doi-asserted-by":"publisher","key":"7","DOI":"10.1109\/96.365507"},{"key":"6","first-page":"123","article-title":"Applicability of MEMS probe card to wafer-level test","volume":"1","author":"itoh","year":"0","journal-title":"Proc InterPACK '99 Maui HI 1999"},{"doi-asserted-by":"publisher","key":"5","DOI":"10.1109\/MEMSYS.1999.746830"},{"doi-asserted-by":"publisher","key":"4","DOI":"10.1109\/MEMSYS.1997.581868"},{"doi-asserted-by":"publisher","key":"9","DOI":"10.1063\/1.1150610"},{"doi-asserted-by":"publisher","key":"8","DOI":"10.1007\/978-3-662-06688-1_27"},{"doi-asserted-by":"publisher","key":"11","DOI":"10.1109\/MEMSYS.2002.984278"}],"event":{"acronym":"TEST-02","name":"2002 International Test Conference","location":"Baltimore, MD, USA"},"container-title":["Proceedings. International Test Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8073\/22329\/01041791.pdf?arnumber=1041791","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T17:38:20Z","timestamp":1489426700000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1041791\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/test.2002.1041791","relation":{},"subject":[]}}