{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,8]],"date-time":"2024-09-08T07:24:28Z","timestamp":1725780268702},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2008,10]]},"DOI":"10.1109\/test.2008.4700550","type":"proceedings-article","created":{"date-parts":[[2008,12,10]],"date-time":"2008-12-10T12:55:58Z","timestamp":1228913758000},"page":"1-9","source":"Crossref","is-referenced-by-count":15,"title":["Unraveling Variability for Process\/Product Improvement"],"prefix":"10.1109","author":[{"given":"A.","family":"Gattiker","sequence":"first","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.896638"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.822735"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1147\/rd.504.0451"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/66.554480"},{"key":"7","doi-asserted-by":"crossref","DOI":"10.1117\/12.483664","article-title":"electrical linewidth metrology for systematic cd variation characterization and causal analysis","author":"cain","year":"2003","journal-title":"proceeding of SPIE"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1117\/1.1488159"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.913194"},{"journal-title":"Spatial Modeling of Gate Length Variation for Process-Design Co-Optimization","year":"2007","author":"friedberg","key":"4"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.863244"},{"key":"8","article-title":"high speed test structures for in-line process monitoring and model calibration","author":"ketchen","year":"2005","journal-title":"Intl Conf on Microelectronic Test Structures"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/TEST.2006.297743"}],"event":{"name":"2008 IEEE International Test Conference","start":{"date-parts":[[2008,10,28]]},"location":"Santa Clara, CA","end":{"date-parts":[[2008,10,30]]}},"container-title":["2008 IEEE International Test Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4690905\/4700527\/04700550.pdf?arnumber=4700550","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T10:37:28Z","timestamp":1497782248000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4700550\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,10]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/test.2008.4700550","relation":{},"subject":[],"published":{"date-parts":[[2008,10]]}}}