{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,4]],"date-time":"2026-04-04T18:03:19Z","timestamp":1775325799478,"version":"3.50.1"},"reference-count":42,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[2018,4,1]],"date-time":"2018-04-01T00:00:00Z","timestamp":1522540800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"funder":[{"name":"MEMS Technology Commercialization"},{"name":"Exploit Technologies Pte, Ltd."},{"name":"Technology commercialization arm of Agency for Science, Technology and Research"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Electron."],"published-print":{"date-parts":[[2018,4]]},"DOI":"10.1109\/tie.2017.2748041","type":"journal-article","created":{"date-parts":[[2017,8,31]],"date-time":"2017-08-31T18:08:03Z","timestamp":1504202883000},"page":"3576-3584","source":"Crossref","is-referenced-by-count":61,"title":["Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications"],"prefix":"10.1109","volume":"65","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-3458-0595","authenticated-orcid":false,"given":"Guoqiang","family":"Wu","sequence":"first","affiliation":[]},{"given":"Jinghui","family":"Xu","sequence":"additional","affiliation":[]},{"given":"Xiaolin","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Nan","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Danlei","family":"Yan","sequence":"additional","affiliation":[]},{"given":"Jayce Lay Keng","family":"Lim","sequence":"additional","affiliation":[]},{"given":"Yao","family":"Zhu","sequence":"additional","affiliation":[]},{"given":"Wei","family":"Li","sequence":"additional","affiliation":[]},{"given":"Yuandong","family":"Gu","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2012.2218711"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2245403"},{"key":"ref33","first-page":"599","article-title":"A 500\ufffdMHz low-phase-noise AlN-on-silicon reference oscillator","author":"lavasani","year":"2007","journal-title":"Proc IEEE Custom Integr Circuits Conf"},{"key":"ref32","first-page":"318","article-title":"A 76\ufffddB$\\Omega$ 1.7\ufffdGHz 0.18\ufffd$\\mu$ m CMOS tunable transimpedance amplifier using broadband current pre-amplifier for high frequency lateral micromechanical oscillators","author":"lavasani","year":"2010","journal-title":"Proc IEEE Int Solid-State Circuits Conf"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2008.976"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2009.2034434"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2009.2030074"},{"key":"ref36","article-title":"Highly accelerated stress screening for air-cooled switching power supplies","author":"weglinski","year":"2007"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/FCS.2014.6859910"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2013.2243451"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/7\/074003"},{"key":"ref40","author":"baschirotto","year":"2013","journal-title":"Frequency References, Power Management for SoC, and Smart Wireless Interfaces"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2012.2191772"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/1\/015017"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2010.5442311"},{"key":"ref14","first-page":"256","article-title":"Introducing high performance crystalFree $^{TM}$ pMEMS oscillators","author":"bhugra","year":"2012","journal-title":"Proc IEEE Freq Control Symp"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2014.6765610"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2008.0171"},{"key":"ref17","first-page":"913","article-title":"High $Q$ low impedance WLCSP resonator for sub-100 MHz programmable oscillator application","author":"wu","year":"2017","journal-title":"Proc IEEE Int Conf Micro-Electro Mech Syst"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1063\/1.4955410"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2283801"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2007.901405"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.883586"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2014.2360377"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/2\/025020"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2012.2211572"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2013.6474192"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2011.2180274"},{"key":"ref8","first-page":"481","article-title":"TCMO $^{TM}$: A Versatile MEMS Oscillator Timing Platform","author":"schoepf","year":"2009","journal-title":"Proc Precise Time and Time Interval"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2008.0167"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2007.240"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2009.2014671"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/1\/013001"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/26\/7\/074003"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2007.09.037"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.886012"},{"key":"ref42","first-page":"329","article-title":"An electronically temperature-compensated 427 MHz low phase-noise AlN-on-Si micromechanical reference oscillator","author":"lavasani","year":"2010","journal-title":"Proc IEEE Radio Freq Integr Circuits Symp"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2011.2104961"},{"key":"ref41","doi-asserted-by":"crossref","first-page":"82","DOI":"10.1109\/TUFFC.1382","article-title":"1.05-GHz CMOS oscillator based on lateral-field-excited piezoelectric AlN contour-mode MEMS resonators","volume":"57","author":"zuo","year":"2010","journal-title":"IEEE Trans Ultrason Ferroelect Freq Control"},{"key":"ref23","doi-asserted-by":"crossref","first-page":"570","DOI":"10.1109\/JMEMS.2010.2045879","article-title":"Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology","volume":"19","author":"zuo","year":"2010","journal-title":"J Microelectromech Syst"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2010.5703313"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2290793"}],"container-title":["IEEE Transactions on Industrial Electronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/41\/8248572\/08023791.pdf?arnumber=8023791","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T16:24:51Z","timestamp":1642004691000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8023791\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,4]]},"references-count":42,"journal-issue":{"issue":"4"},"URL":"https:\/\/doi.org\/10.1109\/tie.2017.2748041","relation":{},"ISSN":["0278-0046","1557-9948"],"issn-type":[{"value":"0278-0046","type":"print"},{"value":"1557-9948","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,4]]}}}