{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,2]],"date-time":"2026-06-02T02:41:37Z","timestamp":1780368097126,"version":"3.54.1"},"reference-count":43,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"2","license":[{"start":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T00:00:00Z","timestamp":1675209600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T00:00:00Z","timestamp":1675209600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T00:00:00Z","timestamp":1675209600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100010877","name":"Shenzhen Science and Technology Innovation Commission","doi-asserted-by":"publisher","award":["GJHZ20180929162202223"],"award-info":[{"award-number":["GJHZ20180929162202223"]}],"id":[{"id":"10.13039\/501100010877","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Huawei Technologies Company Ltd"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Electron."],"published-print":{"date-parts":[[2023,2]]},"DOI":"10.1109\/tie.2022.3157972","type":"journal-article","created":{"date-parts":[[2022,3,15]],"date-time":"2022-03-15T19:40:56Z","timestamp":1647373256000},"page":"1751-1760","source":"Crossref","is-referenced-by-count":3,"title":["Design and Experimental Investigation of Three Degrees of Freedom Nanoscale Microsuspension Actuators"],"prefix":"10.1109","volume":"70","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8078-1278","authenticated-orcid":false,"given":"Mingyuan","family":"Liu","sequence":"first","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8707-1949","authenticated-orcid":false,"given":"Ping","family":"Su","sequence":"additional","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1236-0877","authenticated-orcid":false,"given":"Jianshe","family":"Ma","sequence":"additional","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mali","family":"Gong","sequence":"additional","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rende","family":"Wang","sequence":"additional","affiliation":[{"name":"Henan Hozel Electronics Company Ltd., Henan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1038\/nrg2857-c1"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1364\/OPN.21.7.000028"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1038\/s41377-021-00581-y"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1038\/s41377-021-00575-w"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.45.1124"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.46.3715"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2262599"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/S0957-4158(00)00019-2"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2004.842026"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2004.842028"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2019.2937062"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2021.3057832"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.43.4786"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1098\/rsta.2017.0286"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.47.5809"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1038\/lsa.2014.58"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1063\/1.4826494"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1007\/s10043-016-0246-2"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/j.optlaseng.2011.12.004"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1038\/s42005-021-00532-4"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevD.100.122003"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.44.3373"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-006-0356-z"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1002\/pssc.200777327"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2006.888415"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1063\/5.0056222"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2007.10.003"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.44.3393"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/20\/8\/084005"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1063\/1.3673001"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2014.2299895"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1143\/jjap.50.09mf01"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.11.014"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2008.2011350"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/MRA.2009.933629"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/30.982793"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/20.706829"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2003.816249"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1016\/S0020-7683(00)00054-8"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1088\/0264-9381\/29\/23\/235004"},{"key":"ref41","first-page":"287","article-title":"Advanced LIGO two-stage twelve-axis vibration isolation and positioning platformPart 2: Experimental investigation and tests results","volume":"40","author":"Matichard","year":"2014","journal-title":"Precis. Eng.-J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2019.106473"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1117\/12.820590"}],"container-title":["IEEE Transactions on Industrial Electronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/41\/9913345\/09735159.pdf?arnumber=9735159","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,1,17]],"date-time":"2024-01-17T23:17:07Z","timestamp":1705533427000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9735159\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,2]]},"references-count":43,"journal-issue":{"issue":"2"},"URL":"https:\/\/doi.org\/10.1109\/tie.2022.3157972","relation":{},"ISSN":["0278-0046","1557-9948"],"issn-type":[{"value":"0278-0046","type":"print"},{"value":"1557-9948","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,2]]}}}