{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,30]],"date-time":"2026-01-30T00:17:41Z","timestamp":1769732261921,"version":"3.49.0"},"reference-count":22,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"8","license":[{"start":{"date-parts":[[2023,8,1]],"date-time":"2023-08-01T00:00:00Z","timestamp":1690848000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,8,1]],"date-time":"2023-08-01T00:00:00Z","timestamp":1690848000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,8,1]],"date-time":"2023-08-01T00:00:00Z","timestamp":1690848000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"name":"National Key Research & Development (R&D) Plan","award":["2021YFB3203200"],"award-info":[{"award-number":["2021YFB3203200"]}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51890884"],"award-info":[{"award-number":["51890884"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U1909221"],"award-info":[{"award-number":["U1909221"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Chongqing Natural Science Basic Research Project","award":["cstc2021jcyj-msxmX0801"],"award-info":[{"award-number":["cstc2021jcyj-msxmX0801"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Electron."],"published-print":{"date-parts":[[2023,8]]},"DOI":"10.1109\/tie.2022.3217599","type":"journal-article","created":{"date-parts":[[2022,11,21]],"date-time":"2022-11-21T21:07:34Z","timestamp":1669064854000},"page":"8546-8556","source":"Crossref","is-referenced-by-count":12,"title":["Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams"],"prefix":"10.1109","volume":"70","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4845-6368","authenticated-orcid":false,"given":"Mingzhi","family":"Yu","sequence":"first","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Libo","family":"Zhao","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiangguang","family":"Han","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9649-8154","authenticated-orcid":false,"given":"Chen","family":"Jia","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yong","family":"Xia","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ping","family":"Yang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yun","family":"Zhang","sequence":"additional","affiliation":[{"name":"Brightstone Innovation (Yantai) Research Institute for Micronano Sensing Technology, Yantai, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junjie","family":"Sun","sequence":"additional","affiliation":[{"name":"Brightstone Innovation (Yantai) Research Institute for Micronano Sensing Technology, Yantai, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guangzhao","family":"Qin","sequence":"additional","affiliation":[{"name":"Brightstone Innovation (Yantai) Research Institute for Micronano Sensing Technology, Yantai, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8452-6768","authenticated-orcid":false,"given":"Zhuangde","family":"Jiang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(92)80181-2"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(93)00677-V"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(00)00553-7"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/6\/015"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2006.04.035"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.04.011"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1063\/1.4738640"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.08.033"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.09.025"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-013-1894-9"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6501\/28\/1\/015103"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.09.040"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.3390\/s20061780"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1979.19795"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/S0167-9317(99)00447-5"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/15\/5\/014"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2016.04.053"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.3390\/s16020210"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/S1386-2766(00)80016-X"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1063\/1.1702605"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(91)85017-I"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/25\/3\/033001"}],"container-title":["IEEE Transactions on Industrial Electronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/41\/10075413\/09957110.pdf?arnumber=9957110","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,2,1]],"date-time":"2024-02-01T03:06:40Z","timestamp":1706756800000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9957110\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,8]]},"references-count":22,"journal-issue":{"issue":"8"},"URL":"https:\/\/doi.org\/10.1109\/tie.2022.3217599","relation":{},"ISSN":["0278-0046","1557-9948"],"issn-type":[{"value":"0278-0046","type":"print"},{"value":"1557-9948","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,8]]}}}