{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,31]],"date-time":"2025-12-31T18:53:39Z","timestamp":1767207219446,"version":"3.48.0"},"reference-count":25,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"1","license":[{"start":{"date-parts":[[2026,1,1]],"date-time":"2026-01-01T00:00:00Z","timestamp":1767225600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2026,1,1]],"date-time":"2026-01-01T00:00:00Z","timestamp":1767225600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,1,1]],"date-time":"2026-01-01T00:00:00Z","timestamp":1767225600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62173196"],"award-info":[{"award-number":["62173196"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Electron."],"published-print":{"date-parts":[[2026,1]]},"DOI":"10.1109\/tie.2025.3587141","type":"journal-article","created":{"date-parts":[[2025,8,19]],"date-time":"2025-08-19T18:16:05Z","timestamp":1755627365000},"page":"1449-1458","source":"Crossref","is-referenced-by-count":0,"title":["Vibration Performance Analysis and Improvement of MEMS Resonant Accelerometers"],"prefix":"10.1109","volume":"73","author":[{"ORCID":"https:\/\/orcid.org\/0009-0002-4442-7367","authenticated-orcid":false,"given":"Yukun","family":"Ma","sequence":"first","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0007-2798-4598","authenticated-orcid":false,"given":"Haonan","family":"Li","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0006-7765-4418","authenticated-orcid":false,"given":"Yunfeng","family":"Liu","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9872-2954","authenticated-orcid":false,"given":"Rong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8425-6764","authenticated-orcid":false,"given":"Fengtian","family":"Han","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1109\/TIE.2023.3294597"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1109\/TIE.2017.2701783"},{"doi-asserted-by":"publisher","key":"ref3","DOI":"10.1109\/TIE.2013.2247233"},{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.1109\/ISA62769.2024.10786090"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1109\/INERTIAL60399.2024.10502085"},{"doi-asserted-by":"publisher","key":"ref6","DOI":"10.3390\/mi12121548"},{"doi-asserted-by":"publisher","key":"ref7","DOI":"10.3390\/mi15010065"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1109\/ISS50053.2020.9244880"},{"doi-asserted-by":"publisher","key":"ref9","DOI":"10.1109\/TIE.2010.2076310"},{"doi-asserted-by":"publisher","key":"ref10","DOI":"10.1109\/ISISS.2018.8358142"},{"doi-asserted-by":"publisher","key":"ref11","DOI":"10.1109\/TIE.2023.3277105"},{"doi-asserted-by":"publisher","key":"ref12","DOI":"10.3390\/mi14061188"},{"doi-asserted-by":"publisher","key":"ref13","DOI":"10.1109\/JMEMS.2022.3209576"},{"doi-asserted-by":"publisher","key":"ref14","DOI":"10.1109\/INERTIAL60399.2024.10502084"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.3390\/s151229803"},{"doi-asserted-by":"publisher","key":"ref16","DOI":"10.1088\/0960-1317\/23\/10\/105012"},{"doi-asserted-by":"publisher","key":"ref17","DOI":"10.1109\/JSEN.2023.3255415"},{"doi-asserted-by":"publisher","key":"ref18","DOI":"10.1016\/j.sna.2017.10.043"},{"doi-asserted-by":"publisher","key":"ref19","DOI":"10.1109\/TIM.2024.3470046"},{"doi-asserted-by":"publisher","key":"ref20","DOI":"10.1088\/1361-6439\/acd78c"},{"doi-asserted-by":"publisher","key":"ref21","DOI":"10.1109\/INERTIAL51137.2021.9430477"},{"doi-asserted-by":"publisher","key":"ref22","DOI":"10.1109\/JSEN.2022.3155605"},{"doi-asserted-by":"publisher","key":"ref23","DOI":"10.1109\/JSEN.2023.3300981"},{"doi-asserted-by":"publisher","key":"ref24","DOI":"10.3390\/mi12091022"},{"doi-asserted-by":"publisher","key":"ref25","DOI":"10.1016\/j.sna.2012.12.024"}],"container-title":["IEEE Transactions on Industrial Electronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/41\/11318836\/11130598.pdf?arnumber=11130598","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,12,31]],"date-time":"2025-12-31T18:44:45Z","timestamp":1767206685000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11130598\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,1]]},"references-count":25,"journal-issue":{"issue":"1"},"URL":"https:\/\/doi.org\/10.1109\/tie.2025.3587141","relation":{},"ISSN":["0278-0046","1557-9948"],"issn-type":[{"type":"print","value":"0278-0046"},{"type":"electronic","value":"1557-9948"}],"subject":[],"published":{"date-parts":[[2026,1]]}}}