{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,14]],"date-time":"2026-05-14T17:21:00Z","timestamp":1778779260592,"version":"3.51.4"},"reference-count":38,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"11","license":[{"start":{"date-parts":[[2019,11,1]],"date-time":"2019-11-01T00:00:00Z","timestamp":1572566400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,11,1]],"date-time":"2019-11-01T00:00:00Z","timestamp":1572566400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,11,1]],"date-time":"2019-11-01T00:00:00Z","timestamp":1572566400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51537002"],"award-info":[{"award-number":["51537002"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"National Science and Technology","award":["2017ZX02101"],"award-info":[{"award-number":["2017ZX02101"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Inf."],"published-print":{"date-parts":[[2019,11]]},"DOI":"10.1109\/tii.2019.2906331","type":"journal-article","created":{"date-parts":[[2019,3,27]],"date-time":"2019-03-27T21:57:42Z","timestamp":1553723862000},"page":"5816-5826","source":"Crossref","is-referenced-by-count":44,"title":["Kalman-Filtering-Based Iterative Feedforward Tuning in Presence of Stochastic Noise: With Application to a Wafer Stage"],"prefix":"10.1109","volume":"15","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4403-278X","authenticated-orcid":false,"given":"Li","family":"Li","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9562-0506","authenticated-orcid":false,"given":"Yang","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6382-2891","authenticated-orcid":false,"given":"Liyi","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiubin","family":"Tan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/TAC.2006.878734"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2010.01.006"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2012.6315055"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1115\/1.2957626"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2013.6760949"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1080\/00207179.2016.1219921"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2014.6858833"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2016.2562606"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2014.2327559"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2016.2625309"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2842756"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2008.2007302"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1111\/j.1934-6093.2004.tb00220.x"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TAC.2005.858681"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2007.03.005"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/MCS.2007.384130"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2017.2777387"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2011.12.006"},{"key":"ref19","first-page":"1158","volume":"2","author":"boerlage","year":"0","journal-title":"Proc IEEE Conf Control Appl"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2012.2220973"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1177\/1687814015577599"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2016.2577139"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2015.2470223"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1115\/DSCC2008-2195"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2013.2238548"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2012.2188102"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2013.04.011"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/AMC.2008.4516072"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2013.08.007"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2004.11.004"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2009.2012420"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TAC.2002.804478"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2012.2225439"},{"key":"ref21","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1016\/j.ymssp.2017.10.010","article-title":"Sliding-mode control combined with improved adaptive feedforward for wafer scanner","volume":"103","author":"li","year":"2017","journal-title":"Mech Syst Signal Process"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2017.2773472"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2017.2684820"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2014.2327578"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1080\/00207170903334805"}],"container-title":["IEEE Transactions on Industrial Informatics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9424\/8892749\/08675518.pdf?arnumber=8675518","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,13]],"date-time":"2022-07-13T20:51:36Z","timestamp":1657745496000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8675518\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,11]]},"references-count":38,"journal-issue":{"issue":"11"},"URL":"https:\/\/doi.org\/10.1109\/tii.2019.2906331","relation":{},"ISSN":["1551-3203","1941-0050"],"issn-type":[{"value":"1551-3203","type":"print"},{"value":"1941-0050","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,11]]}}}