{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,16]],"date-time":"2026-07-16T14:52:59Z","timestamp":1784213579745,"version":"3.55.0"},"reference-count":30,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"5","license":[{"start":{"date-parts":[[2023,5,1]],"date-time":"2023-05-01T00:00:00Z","timestamp":1682899200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,5,1]],"date-time":"2023-05-01T00:00:00Z","timestamp":1682899200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,5,1]],"date-time":"2023-05-01T00:00:00Z","timestamp":1682899200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U2013211"],"award-info":[{"award-number":["U2013211"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51975375"],"award-info":[{"award-number":["51975375"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52105581"],"award-info":[{"award-number":["52105581"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["2021M692065"],"award-info":[{"award-number":["2021M692065"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ind. Inf."],"published-print":{"date-parts":[[2023,5]]},"DOI":"10.1109\/tii.2022.3199263","type":"journal-article","created":{"date-parts":[[2022,8,17]],"date-time":"2022-08-17T19:39:22Z","timestamp":1660765162000},"page":"6460-6470","source":"Crossref","is-referenced-by-count":33,"title":["Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control"],"prefix":"10.1109","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4612-6410","authenticated-orcid":false,"given":"Yixuan","family":"Meng","sequence":"first","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1661-8927","authenticated-orcid":false,"given":"Xiangyuan","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2762-1299","authenticated-orcid":false,"given":"Wei-Wei","family":"Huang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6093-5842","authenticated-orcid":false,"given":"Linlin","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3504-3065","authenticated-orcid":false,"given":"Chuxiong","family":"Hu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9241-9172","authenticated-orcid":false,"given":"XinQuan","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3194-6731","authenticated-orcid":false,"given":"LiMin","family":"Zhu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2019.2899566"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2017.09.003"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2022.113467"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1177\/1077546320941705"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TEVC.2008.927706"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2019.2937051"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2006.07.032"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2021.3081418"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2021.3051068"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1115\/1.3143822"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/ TASE.2021.3104478"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2015.2411438"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2017.2684820"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.3013795"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.2975343"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TNNLS.2017.2665581"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.2991997"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2014.2359620"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmachtools.2012.12.007"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2017.2709813"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2018.2876724"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/MMAR.2016.7575193"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2019.05.046"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2008.2001186"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2011.08.006"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.2514\/3.10451"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2014.2352364"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1038\/s42256-020-0203-4"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2012.2194301"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2012.2203315"}],"container-title":["IEEE Transactions on Industrial Informatics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9424\/10116046\/09858620.pdf?arnumber=9858620","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,6,12]],"date-time":"2023-06-12T18:33:57Z","timestamp":1686594837000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9858620\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,5]]},"references-count":30,"journal-issue":{"issue":"5"},"URL":"https:\/\/doi.org\/10.1109\/tii.2022.3199263","relation":{},"ISSN":["1551-3203","1941-0050"],"issn-type":[{"value":"1551-3203","type":"print"},{"value":"1941-0050","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,5]]}}}