{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,19]],"date-time":"2025-10-19T15:37:54Z","timestamp":1760888274148},"reference-count":20,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[2009,4,1]],"date-time":"2009-04-01T00:00:00Z","timestamp":1238544000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2009,4]]},"DOI":"10.1109\/tim.2008.2006964","type":"journal-article","created":{"date-parts":[[2008,12,3]],"date-time":"2008-12-03T20:47:59Z","timestamp":1228337279000},"page":"1183-1187","source":"Crossref","is-referenced-by-count":6,"title":["Atomic-Layer-Deposited Alumina $(\\hbox{Al}_{2}\\hbox{O}_{3})$ Coating on Thin-Film Cryoresistors"],"prefix":"10.1109","volume":"58","author":[{"given":"O.M.","family":"Hahtela","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.F.","family":"Satrapinski","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"P.H.","family":"Sievila","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"N.","family":"Chekurov","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(92)90874-B"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"230","DOI":"10.1016\/0039-6028(95)90033-0","article-title":"Surface chemistry of <ref_formula><tex Notation=\"TeX\">$\\hbox{Al}_{2}\\hbox{O}_{3}$<\/tex><\/ref_formula> deposition using <ref_formula><tex Notation=\"TeX\">$\\hbox{Al}(\\hbox{CH}_{3})_{3}$<\/tex><\/ref_formula> and <ref_formula><tex Notation=\"TeX\">$\\hbox{H}_{2} \\hbox{O}$<\/tex><\/ref_formula> in a binary reaction sequence","volume":"322","author":"dillon","year":"1995","journal-title":"Surf Sci"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(96)08934-1"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(02)00319-9"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(02)00438-8"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/4\/010"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/8\/041"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1063\/1.1736329"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(01)00715-4"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1002\/crat.200510605"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1088\/0026-1394\/45\/1\/014"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2003.811578"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.1990.1032927"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/19.192291"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/CPEM.2008.4574697"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/19\/5\/055102"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1088\/0026-1394\/37\/3\/4"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1007\/BF00683782"},{"key":"ref9","first-page":"272","article-title":"Atomic layer deposited alumina <ref_formula><tex Notation=\"TeX\">$(\\hbox{Al}_{2}\\hbox{O}_{3})$<\/tex><\/ref_formula> coating on thin film cryoresistors","author":"hahtela","year":"2008","journal-title":"CPEM Conf Dig"},{"key":"ref20","first-page":"339","article-title":"Electrical properties of sputtered Ni?Cr?Al?Cu thin film resistors with Ni and Cr contents","volume":"40","author":"lee","year":"2002","journal-title":"J Korean Phys Soc"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/19\/4799271\/04674600.pdf?arnumber=4674600","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,12,23]],"date-time":"2021-12-23T20:07:41Z","timestamp":1640290061000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4674600\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,4]]},"references-count":20,"journal-issue":{"issue":"4"},"URL":"https:\/\/doi.org\/10.1109\/tim.2008.2006964","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"value":"0018-9456","type":"print"},{"value":"1557-9662","type":"electronic"}],"subject":[],"published":{"date-parts":[[2009,4]]}}}