{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,21]],"date-time":"2026-02-21T04:06:27Z","timestamp":1771646787892,"version":"3.50.1"},"reference-count":19,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"5","license":[{"start":{"date-parts":[[2012,5,1]],"date-time":"2012-05-01T00:00:00Z","timestamp":1335830400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2012,5]]},"DOI":"10.1109\/tim.2011.2178678","type":"journal-article","created":{"date-parts":[[2012,2,10]],"date-time":"2012-02-10T19:24:22Z","timestamp":1328901862000},"page":"1315-1322","source":"Crossref","is-referenced-by-count":30,"title":["Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements"],"prefix":"10.1109","volume":"61","author":[{"given":"Sha","family":"Xia","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stoyan","family":"Nihtianov","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","first-page":"1575","article-title":"Concept evaluation of a high performance self-aligning capacitive displacement sensor","author":"xia","year":"2009","journal-title":"Proc IEEE ICIT"},{"key":"ref11","first-page":"110","article-title":"Thermal stepper: A high stability positioning system for micro adjustment","author":"van schieveen","year":"2009","journal-title":"Proc EUSPEN"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TCSI.2005.853909"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/CICC.2007.4405827"},{"key":"ref14","first-page":"16","article-title":"A monolithic surface micromachined <ref_formula><tex Notation=\"TeX\">$z$<\/tex><\/ref_formula>-axis gyroscope with digital output","author":"jiang","year":"2000","journal-title":"Proc Symp VLSI Circuits"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/5.542410"},{"key":"ref16","author":"hastings","year":"2000","journal-title":"The Art of Analog Layout"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2008.922390"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/32\/14\/201"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/19.481317"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2005.1597858"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/IMTC.2011.5944084"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/9780470544358"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/4.753678"},{"key":"ref8","first-page":"172","article-title":"A 100 dB SNR 2.5MS\/s output data rate <ref_formula><tex Notation=\"TeX\">$\\Delta\\Sigma$<\/tex><\/ref_formula> ADC","author":"brewer","year":"2005","journal-title":"Proc ISSCC Dig Tech Papers"},{"key":"ref7","author":"markus","year":"2005","journal-title":"Higher-order incremental delta-sigma analog-to-digital converters"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2005.863148"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/9780470544228"},{"key":"ref9","year":"0","journal-title":"Data Sheet AD7760"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/19\/6178360\/06151147.pdf?arnumber=6151147","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,10,10]],"date-time":"2021-10-10T23:52:03Z","timestamp":1633909923000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6151147\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,5]]},"references-count":19,"journal-issue":{"issue":"5"},"URL":"https:\/\/doi.org\/10.1109\/tim.2011.2178678","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"value":"0018-9456","type":"print"},{"value":"1557-9662","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,5]]}}}