{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T07:50:41Z","timestamp":1675237841820},"reference-count":21,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"4","license":[{"start":{"date-parts":[[2012,4,1]],"date-time":"2012-04-01T00:00:00Z","timestamp":1333238400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2012,4]]},"DOI":"10.1109\/tim.2011.2179824","type":"journal-article","created":{"date-parts":[[2012,1,6]],"date-time":"2012-01-06T22:30:13Z","timestamp":1325889013000},"page":"865-875","source":"Crossref","is-referenced-by-count":3,"title":["Discrete Wavelet Transform and Radial Basis Neural Network for Semiconductor Wet-Etching Fabrication Flow-Rate Analysis"],"prefix":"10.1109","volume":"61","author":[{"given":"Wen-Ren","family":"Yang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ISMSS.1993.263688"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TADVP.2004.828824"},{"key":"ref12","first-page":"124","article-title":"Application development of virtual metrology in semiconductor industry","author":"chang","year":"2005","journal-title":"Proc 31st IEEE Annu Conf Ind Electron"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2010.5551439"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/ICMA.2010.5588327"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2115261"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1137\/1.9781611970104"},{"key":"ref17","author":"proakis","year":"1996","journal-title":"Digital Signal Processing"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/72.329697"},{"key":"ref19","author":"hagan","year":"1995","journal-title":"Neural Network Design"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2010.2101350"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2009.2015702"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/19.963220"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2008.922092"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/ISMSS.1990.66119"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2009.2027769"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2006.876386"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2002.802247"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/66.216928"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/72.80341"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/PROC.1978.10837"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/19\/6165484\/06125246.pdf?arnumber=6125246","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,10,10]],"date-time":"2021-10-10T23:51:39Z","timestamp":1633909899000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6125246\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,4]]},"references-count":21,"journal-issue":{"issue":"4"},"URL":"https:\/\/doi.org\/10.1109\/tim.2011.2179824","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"value":"0018-9456","type":"print"},{"value":"1557-9662","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,4]]}}}