{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,1,10]],"date-time":"2024-01-10T01:09:34Z","timestamp":1704848974907},"reference-count":17,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"6","license":[{"start":{"date-parts":[[2013,6,1]],"date-time":"2013-06-01T00:00:00Z","timestamp":1370044800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2013,6]]},"DOI":"10.1109\/tim.2012.2225963","type":"journal-article","created":{"date-parts":[[2012,11,14]],"date-time":"2012-11-14T19:02:18Z","timestamp":1352919738000},"page":"1646-1651","source":"Crossref","is-referenced-by-count":10,"title":["Wideband High Stability MEMS-Based AC Voltage References"],"prefix":"10.1109","volume":"62","author":[{"given":"Alexandre","family":"Bounouh","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Henri","family":"Camon","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Denis","family":"Belieres","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2009.5285943"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"299","DOI":"10.1016\/j.sna.2006.11.025","article-title":"Advantages of alternative actuating signal for MEMS actuators","volume":"136","author":"camon","year":"2007","journal-title":"Sens Actuators A Phys"},{"key":"ref12","author":"k\ufffdrkk\ufffdinen","year":"2005","journal-title":"EMMA final technical report"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.02.033"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2011.5734510"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.csi.2010.06.007"},{"key":"ref16","first-page":"1","article-title":"Development of electromechanical architectures for ac voltage metrology","volume":"123","author":"bounouh","year":"2010","journal-title":"Sens Transducers J"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/CPEM.2012.6251048"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.1987.6312694"},{"key":"ref3","author":"gray","year":"1994","journal-title":"Analysis and Design of Analog Integrated Circuits"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/19.982935"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/CPEM.1998.699739"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1007\/s005420050137"},{"key":"ref7","article-title":"MEMSOI multi project wafers service?SOI high aspect ratio micromachining","author":"collet","year":"2007","journal-title":"Proc MEMS Syst Workshop"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1140\/epjst\/e2009-01050-6"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0026-1394\/26\/1\/004"},{"key":"ref9","first-page":"220","article-title":"A novel fatigue test with ramping stress amplitude to evaluate the fatigue behavior of polysilicon thin films","author":"le huy","year":"2010","journal-title":"Proc IEEE MEMS"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/19\/6514981\/06353573.pdf?arnumber=6353573","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,29]],"date-time":"2021-11-29T20:47:18Z","timestamp":1638218838000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6353573\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,6]]},"references-count":17,"journal-issue":{"issue":"6"},"URL":"https:\/\/doi.org\/10.1109\/tim.2012.2225963","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"value":"0018-9456","type":"print"},{"value":"1557-9662","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,6]]}}}