{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T10:08:56Z","timestamp":1740132536025,"version":"3.37.3"},"reference-count":33,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2021,1,1]],"date-time":"2021-01-01T00:00:00Z","timestamp":1609459200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,1,1]],"date-time":"2021-01-01T00:00:00Z","timestamp":1609459200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,1,1]],"date-time":"2021-01-01T00:00:00Z","timestamp":1609459200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2021]]},"DOI":"10.1109\/tim.2020.3008987","type":"journal-article","created":{"date-parts":[[2020,7,20]],"date-time":"2020-07-20T20:54:12Z","timestamp":1595278452000},"page":"1-13","source":"Crossref","is-referenced-by-count":7,"title":["An AlN Micromachined Mass Sensor: Modeling and Characterization"],"prefix":"10.1109","volume":"70","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-0916-1516","authenticated-orcid":false,"given":"Ada","family":"Fort","sequence":"first","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6789-5580","authenticated-orcid":false,"given":"Carlo","family":"Trigona","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2779-4878","authenticated-orcid":false,"given":"Enza","family":"Panzardi","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2509-6566","authenticated-orcid":false,"given":"Valerio","family":"Vignoli","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0168-9404","authenticated-orcid":false,"given":"Tommaso","family":"Addabbo","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2410-1581","authenticated-orcid":false,"given":"Marco","family":"Mugnaini","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref33","doi-asserted-by":"crossref","first-page":"185","DOI":"10.1080\/108939597200214","volume":"1","author":"thundat","year":"1997","journal-title":"Microcantilever Sensors Microscale Thermophysical Engineering"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.3390\/s91209945"},{"journal-title":"PiezoMUMPs Design Handbook (Revision 1 3)","year":"2014","author":"cowen","key":"ref31"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1063\/1.1478137"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.3390\/mi7090160"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2017.2785118"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2004.840258"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2006.873792"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2018.2860597"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2011.2147301"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.11.032"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1063\/1.1763252"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1063\/1.2171650"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/SENSORS43011.2019.8956695"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1016\/j.compstruct.2015.09.046"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2014.11.379"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/SAS.2019.8705996"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2018.12.021"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2012.2212592"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1016\/j.jsv.2018.06.034"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2017.2669759"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2017.8017104"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2007.01.199"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2017.2747140"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/s10586-018-2085-3"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/MIM.2012.6145254"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2020.2969967"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2017.01.017"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.2478\/msr-2014-0021"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2017.2712629"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2019.2908879"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1063\/1.359562"},{"key":"ref25","first-page":"206","article-title":"The use of quartz oscillators for weighing thin layers and for microweighing","volume":"155","author":"sauerbrey","year":"1959","journal-title":"J Phys"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/19\/9259274\/09144611.pdf?arnumber=9144611","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T14:51:31Z","timestamp":1652194291000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9144611\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021]]},"references-count":33,"URL":"https:\/\/doi.org\/10.1109\/tim.2020.3008987","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"type":"print","value":"0018-9456"},{"type":"electronic","value":"1557-9662"}],"subject":[],"published":{"date-parts":[[2021]]}}}