{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,4,5]],"date-time":"2025-04-05T07:24:50Z","timestamp":1743837890884,"version":"3.37.3"},"reference-count":50,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2023,1,1]],"date-time":"2023-01-01T00:00:00Z","timestamp":1672531200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,1,1]],"date-time":"2023-01-01T00:00:00Z","timestamp":1672531200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,1,1]],"date-time":"2023-01-01T00:00:00Z","timestamp":1672531200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2020YFB1712700"],"award-info":[{"award-number":["2020YFB1712700"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61925307","62127811","62273334"],"award-info":[{"award-number":["61925307","62127811","62273334"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002367","name":"Chinese Academy of Sciences through the Instrument Developing","doi-asserted-by":"publisher","award":["YJKYYQ20210050"],"award-info":[{"award-number":["YJKYYQ20210050"]}],"id":[{"id":"10.13039\/501100002367","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002367","name":"Youth Innovation Promotion Association of Chinese Academy of Sciences","doi-asserted-by":"publisher","award":["2021197"],"award-info":[{"award-number":["2021197"]}],"id":[{"id":"10.13039\/501100002367","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2023]]},"DOI":"10.1109\/tim.2023.3314817","type":"journal-article","created":{"date-parts":[[2023,9,13]],"date-time":"2023-09-13T17:33:36Z","timestamp":1694626416000},"page":"1-11","source":"Crossref","is-referenced-by-count":5,"title":["Noncontact Subnanometer Resolution Displacement Sensing With Wide Bandwidth Based on Squeeze Film Damping Effect"],"prefix":"10.1109","volume":"72","author":[{"ORCID":"https:\/\/orcid.org\/0009-0009-0918-8859","authenticated-orcid":false,"given":"Shenghang","family":"Zhai","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6853-619X","authenticated-orcid":false,"given":"Jialin","family":"Shi","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4183-7179","authenticated-orcid":false,"given":"Peng","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7939-6567","authenticated-orcid":false,"given":"Tie","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4339-6709","authenticated-orcid":false,"given":"Yang","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9086-3747","authenticated-orcid":false,"given":"Chanmin","family":"Su","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2271-5870","authenticated-orcid":false,"given":"Lianqing","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref13","DOI":"10.1016\/j.apsusc.2014.08.011"},{"key":"ref12","first-page":"2141","article-title":"Characterization of surface roughness of unworn hydrogel contact lenses at a nanometric scale using methods of modern metrology","volume":"53","author":"talu","year":"2013","journal-title":"Polymer Eng Sci"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.1109\/ACCESS.2019.2947570"},{"doi-asserted-by":"publisher","key":"ref14","DOI":"10.1109\/JSSC.2020.3044027"},{"doi-asserted-by":"publisher","key":"ref11","DOI":"10.1109\/JMEMS.2019.2908879"},{"doi-asserted-by":"publisher","key":"ref10","DOI":"10.1016\/j.spmi.2016.10.010"},{"doi-asserted-by":"publisher","key":"ref17","DOI":"10.1063\/1.4819743"},{"doi-asserted-by":"publisher","key":"ref16","DOI":"10.1109\/JSEN.2010.2103307"},{"doi-asserted-by":"publisher","key":"ref19","DOI":"10.3390\/s19163592"},{"doi-asserted-by":"publisher","key":"ref18","DOI":"10.1016\/j.measurement.2019.106961"},{"key":"ref50","doi-asserted-by":"crossref","DOI":"10.1063\/1.2188867","article-title":"Development of liquid-environment frequency modulation atomic force microscope with low noise deflection sensor for cantilevers of various dimensions","volume":"77","author":"fukuma","year":"2006","journal-title":"Rev Sci Instrum"},{"doi-asserted-by":"publisher","key":"ref46","DOI":"10.1063\/1.3531948"},{"doi-asserted-by":"publisher","key":"ref45","DOI":"10.1107\/S1600577514025715"},{"doi-asserted-by":"publisher","key":"ref48","DOI":"10.1109\/TMECH.2023.3265329"},{"doi-asserted-by":"publisher","key":"ref47","DOI":"10.1109\/TIM.2023.3268473"},{"doi-asserted-by":"publisher","key":"ref42","DOI":"10.1038\/nnano.2015.254"},{"doi-asserted-by":"publisher","key":"ref41","DOI":"10.1063\/1.1144209"},{"doi-asserted-by":"publisher","key":"ref44","DOI":"10.1017\/hpl.2021.16"},{"doi-asserted-by":"publisher","key":"ref43","DOI":"10.1109\/TOH.2020.2985364"},{"doi-asserted-by":"publisher","key":"ref49","DOI":"10.1073\/pnas.211400898"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1016\/j.sse.2019.03.006"},{"doi-asserted-by":"publisher","key":"ref7","DOI":"10.1038\/s41928-018-0150-9"},{"doi-asserted-by":"publisher","key":"ref9","DOI":"10.1016\/j.sna.2022.113874"},{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.1038\/s41378-021-00298-3"},{"doi-asserted-by":"publisher","key":"ref3","DOI":"10.1088\/2631-7990\/abff6a"},{"doi-asserted-by":"publisher","key":"ref6","DOI":"10.1007\/978-3-030-13654-3"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1063\/1.332840"},{"doi-asserted-by":"publisher","key":"ref40","DOI":"10.3390\/s90503854"},{"doi-asserted-by":"publisher","key":"ref35","DOI":"10.1063\/1.342563"},{"year":"2006","author":"mininni","journal-title":"Method and apparatus for rapid automatic engagement of a probe","key":"ref34"},{"doi-asserted-by":"publisher","key":"ref37","DOI":"10.1088\/1361-6528\/aae40b"},{"doi-asserted-by":"publisher","key":"ref36","DOI":"10.1088\/0957-4484\/4\/4\/007"},{"doi-asserted-by":"publisher","key":"ref31","DOI":"10.1016\/j.jsv.2020.115720"},{"doi-asserted-by":"publisher","key":"ref30","DOI":"10.1038\/s41378-021-00279-6"},{"doi-asserted-by":"publisher","key":"ref33","DOI":"10.1115\/1.3645878"},{"doi-asserted-by":"publisher","key":"ref32","DOI":"10.1103\/PhysRevApplied.19.044005"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1126\/sciadv.aax0800"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1103\/PhysRevLett.116.231101"},{"doi-asserted-by":"publisher","key":"ref39","DOI":"10.1038\/srep16393"},{"doi-asserted-by":"publisher","key":"ref38","DOI":"10.1063\/1.108593"},{"doi-asserted-by":"publisher","key":"ref24","DOI":"10.1007\/s10470-019-01560-5"},{"doi-asserted-by":"publisher","key":"ref23","DOI":"10.1108\/ILT-06-2019-0226"},{"doi-asserted-by":"publisher","key":"ref26","DOI":"10.1007\/s10470-018-1283-5"},{"doi-asserted-by":"publisher","key":"ref25","DOI":"10.1007\/s00542-019-04416-0"},{"doi-asserted-by":"publisher","key":"ref20","DOI":"10.1038\/s41566-020-0586-0"},{"doi-asserted-by":"publisher","key":"ref22","DOI":"10.1016\/j.ijmecsci.2016.11.009"},{"doi-asserted-by":"publisher","key":"ref21","DOI":"10.1016\/j.sna.2007.01.008"},{"doi-asserted-by":"publisher","key":"ref28","DOI":"10.1007\/s11071-019-04928-4"},{"doi-asserted-by":"publisher","key":"ref27","DOI":"10.1016\/j.sna.2023.114166"},{"doi-asserted-by":"publisher","key":"ref29","DOI":"10.1016\/j.ymssp.2019.02.060"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/19\/10012124\/10251037.pdf?arnumber=10251037","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,10,23]],"date-time":"2023-10-23T18:01:09Z","timestamp":1698084069000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10251037\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023]]},"references-count":50,"URL":"https:\/\/doi.org\/10.1109\/tim.2023.3314817","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"type":"print","value":"0018-9456"},{"type":"electronic","value":"1557-9662"}],"subject":[],"published":{"date-parts":[[2023]]}}}