{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,3,30]],"date-time":"2025-03-30T04:01:37Z","timestamp":1743307297943,"version":"3.40.3"},"reference-count":40,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2023YFB4706700"],"award-info":[{"award-number":["2023YFB4706700"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62127811","61925307","61927805","62273334"],"award-info":[{"award-number":["62127811","61925307","61927805","62273334"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Key Tasks for Industrial Technological Innovation in Liaoning Province"},{"DOI":"10.13039\/501100004739","name":"Youth Innovation Promotion Association of the Chinese Academy of Sciences","doi-asserted-by":"publisher","award":["2021197"],"award-info":[{"award-number":["2021197"]}],"id":[{"id":"10.13039\/501100004739","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["GZB20240797"],"award-info":[{"award-number":["GZB20240797"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003787","name":"New Cornerstone Science Foundation through the Xplorer Prize","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100003787","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Instrum. Meas."],"published-print":{"date-parts":[[2025]]},"DOI":"10.1109\/tim.2025.3548802","type":"journal-article","created":{"date-parts":[[2025,3,18]],"date-time":"2025-03-18T17:33:02Z","timestamp":1742319182000},"page":"1-9","source":"Crossref","is-referenced-by-count":0,"title":["Multiscale Profile Characterization Based on Atomic Force Microscopy"],"prefix":"10.1109","volume":"74","author":[{"ORCID":"https:\/\/orcid.org\/0009-0005-3721-7961","authenticated-orcid":false,"given":"Kaixuan","family":"Wang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0009-0000-2853-0140","authenticated-orcid":false,"given":"Dingyi","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0009-0002-4830-5527","authenticated-orcid":false,"given":"Jian","family":"Sun","sequence":"additional","affiliation":[{"name":"Innovation Institute, Intelligent Robotics Shenyang Company Ltd., Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6853-619X","authenticated-orcid":false,"given":"Jialin","family":"Shi","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4183-7179","authenticated-orcid":false,"given":"Peng","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9086-3747","authenticated-orcid":false,"given":"Chanmin","family":"Su","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2271-5870","authenticated-orcid":false,"given":"Lianqing","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1007\/s11465-017-0455-9"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmachtools.2015.02.001"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmachtools.2019.04.009"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1002\/adom.201900598"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202300546"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1021\/nl049540a"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1039\/D0NR07539F"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2011.11.004"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/4\/R01"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1364\/PRJ.472212"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1038\/s41578-019-0118-z"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202270329"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-021-00672-z"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.apsusc.2015.09.052"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/S1748-0132(07)70140-8"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2010.06.011"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1038\/nmat3280"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/JSTQE.2013.2275942"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.8b09899"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1504\/IJSURFSE.2009.027418"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/28\/1\/012001"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/0043-1648(82)90335-0"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1364\/OE.11.001793"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2012.09.022"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1016\/S0109-5641(99)00017-2"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-319-92267-6_29"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/0890-6955(92)90084-T"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1179\/026708400101517260"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1002\/sca.4950230404"},{"volume-title":"Design, Characterization, and Control of a High-Bandwidth Serial-Kinematic Nanopositioning Stage for Scanning Probe Microscopy Applications","year":"2010","author":"Kenton","key":"ref30"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1063\/1.4765048"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-009-0087-z"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1063\/1.3683235"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/9\/7\/014"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1063\/1.1651638"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.2982113"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1002\/smll.202470010"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1002\/smtd.202300235"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/26\/6\/065501"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1109\/ACC.2000.877064"}],"container-title":["IEEE Transactions on Instrumentation and Measurement"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/19\/10764799\/10927654.pdf?arnumber=10927654","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,3,29]],"date-time":"2025-03-29T03:24:50Z","timestamp":1743218690000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10927654\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025]]},"references-count":40,"URL":"https:\/\/doi.org\/10.1109\/tim.2025.3548802","relation":{},"ISSN":["0018-9456","1557-9662"],"issn-type":[{"type":"print","value":"0018-9456"},{"type":"electronic","value":"1557-9662"}],"subject":[],"published":{"date-parts":[[2025]]}}}