{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,23]],"date-time":"2024-09-23T04:27:12Z","timestamp":1727065632326},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,9,16]],"date-time":"2021-09-16T00:00:00Z","timestamp":1631750400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,9,16]],"date-time":"2021-09-16T00:00:00Z","timestamp":1631750400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,9,16]],"date-time":"2021-09-16T00:00:00Z","timestamp":1631750400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,9,16]]},"DOI":"10.1109\/vdat53777.2021.9601046","type":"proceedings-article","created":{"date-parts":[[2021,11,10]],"date-time":"2021-11-10T23:41:04Z","timestamp":1636587664000},"source":"Crossref","is-referenced-by-count":3,"title":["High Sensitivity and Power Efficient Heater Structure for Bulk Micromachined Thermal Accelerometer"],"prefix":"10.1109","author":[{"given":"Rahul","family":"Mukherjee","sequence":"first","affiliation":[]},{"given":"Joydeep","family":"Basu","sequence":"additional","affiliation":[]},{"given":"Prasanta Kumar","family":"Guha","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-017-3338-4"},{"key":"ref11","first-page":"1","article-title":"Realization and study of a thermal gyroscope based on thermal expansion","author":"kock","year":"2018","journal-title":"2018 Symposium on Design Test Integration & Packaging of MEMS and MOEMS (DTIP)"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2016.02.018"},{"key":"ref13","year":"0"},{"key":"ref14","article-title":"Design of a Dual Axis Thermal Accelerometer using Single Axis Structure","author":"mukherjee","year":"2019","journal-title":"COMSOL Conference"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2010.11.020"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2006.04.057"},{"key":"ref3","first-page":"33","article-title":"Research on the Output Characteristics of MEMS Convective Accelerometer under Heavy Impact","author":"sun","year":"2009","journal-title":"3rd IEEE International Conference on Nano\/Micro Engineered and Molecular Systems NEMS"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2011.05.029"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2692(02)00194-5"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-015-2658-5"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2008.925347"},{"key":"ref2","year":"0"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/aa964d"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.856651"}],"event":{"name":"2021 25th International Symposium on VLSI Design and Test (VDAT)","location":"Surat, India","start":{"date-parts":[[2021,9,16]]},"end":{"date-parts":[[2021,9,18]]}},"container-title":["2021 25th International Symposium on VLSI Design and Test (VDAT)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9600867\/9600899\/09601046.pdf?arnumber=9601046","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T16:50:52Z","timestamp":1652201452000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9601046\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,9,16]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/vdat53777.2021.9601046","relation":{},"subject":[],"published":{"date-parts":[[2021,9,16]]}}}