{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,4]],"date-time":"2026-06-04T21:00:40Z","timestamp":1780606840668,"version":"3.54.1"},"reference-count":6,"publisher":"IEEE","license":[{"start":{"date-parts":[[2022,6,12]],"date-time":"2022-06-12T00:00:00Z","timestamp":1654992000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2022,6,12]],"date-time":"2022-06-12T00:00:00Z","timestamp":1654992000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2022,6,12]]},"DOI":"10.1109\/vlsitechnologyandcir46769.2022.9830450","type":"proceedings-article","created":{"date-parts":[[2022,7,22]],"date-time":"2022-07-22T12:42:52Z","timestamp":1658493772000},"page":"363-364","source":"Crossref","is-referenced-by-count":5,"title":["Standard Cell Design Optimization with Advanced MOL Technology in 3nm GAA Process"],"prefix":"10.1109","author":[{"given":"Giyoung","family":"Yang","sequence":"first","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hakchul","family":"Jung","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jinyoung","family":"Lim","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jaewoo","family":"Seo","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ingyum","family":"Kim","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jisu","family":"Yu","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hyeoungyu","family":"You","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jeongsoon","family":"Kong","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Garoom","family":"Kim","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Minjae","family":"Jeong","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chanhee","family":"Park","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sera","family":"An","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Woojin","family":"Rim","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hayoung","family":"Kim","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dalhee","family":"Lee","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sanghoon","family":"Baek","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jonghoon","family":"Jung","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Taejoong","family":"Song","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jongwook","family":"Kye","sequence":"additional","affiliation":[{"name":"Samsung Electronics Co., Ltd.,Foundry Division,Hwaseong-si,Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref4","first-page":"196","author":"guo","year":"2018","journal-title":"ISSCC"},{"key":"ref3","first-page":"1","author":"t?kei","year":"2016","journal-title":"VLSI"},{"key":"ref6","first-page":"1440","author":"gerosa","year":"1994","journal-title":"JSSC"},{"key":"ref5","first-page":"536","author":"stojanovic","year":"1999","journal-title":"JSSC"},{"key":"ref2","first-page":"230t","author":"loubet","year":"2017","journal-title":"VLSI"},{"key":"ref1","first-page":"28.7.1","author":"bae","year":"2018","journal-title":"IEDM"}],"event":{"name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","location":"Honolulu, HI, USA","start":{"date-parts":[[2022,6,12]]},"end":{"date-parts":[[2022,6,17]]}},"container-title":["2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9830116\/9830138\/09830450.pdf?arnumber=9830450","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,27]],"date-time":"2026-05-27T19:41:11Z","timestamp":1779910871000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9830450\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,6,12]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/vlsitechnologyandcir46769.2022.9830450","relation":{},"subject":[],"published":{"date-parts":[[2022,6,12]]}}}