{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,18]],"date-time":"2026-06-18T16:10:32Z","timestamp":1781799032441,"version":"3.54.5"},"reference-count":11,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,6,16]]},"DOI":"10.1109\/vlsitechnologyandcir46783.2024.10631441","type":"proceedings-article","created":{"date-parts":[[2024,8,26]],"date-time":"2024-08-26T17:23:31Z","timestamp":1724693011000},"page":"1-2","source":"Crossref","is-referenced-by-count":2,"title":["Backside Power Delivery with relaxed overlay for backside patterning using extreme wafer thinning and Molybdenum-filled slit nano Through Silicon Vias"],"prefix":"10.1109","author":[{"given":"P.","family":"Zhao","sequence":"first","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"L.","family":"Witters","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"A.","family":"Jourdain","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"M.","family":"Stucchi","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"N.","family":"Jourdan","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"J.W.","family":"Maes","sequence":"additional","affiliation":[{"name":"ASM,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"H.","family":"Bana","sequence":"additional","affiliation":[{"name":"ASM,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"C.","family":"Zhu","sequence":"additional","affiliation":[{"name":"ASM,Helsinki,Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"R.","family":"Chukka","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"F.","family":"Sebaai","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"K.","family":"Vandersmissen","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"N.","family":"Heylen","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"D.","family":"Montero","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"S.","family":"Wang","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"K.","family":"D'Have","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"F.","family":"Schleicher","sequence":"additional","affiliation":[{"name":"KLA Corp,Newport,U.K.,NP18 2TA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"J.","family":"De Vos","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"G.","family":"Beyer","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"A.","family":"Miller","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"E.","family":"Beyne","sequence":"additional","affiliation":[{"name":"IMEC,Leuven,Belgium,3001"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","author":"Ryckaert","year":"2019","journal-title":"EDTM"},{"key":"ref2","author":"Prasad","year":"2020","journal-title":"IEDM"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/0167-9260(89)90063-1"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.5772\/139"},{"key":"ref5","author":"Yang","year":"2023","journal-title":"VLSI"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/0167-9260(89)90063-1"},{"key":"ref7","author":"Kobrinsky","year":"2023","journal-title":"IEDM"},{"key":"ref8","author":"Gupta","year":"2020","journal-title":"TED"},{"key":"ref9","author":"Jourdain","year":"2022","journal-title":"ECTC"},{"key":"ref10","author":"Sisto","year":"2023","journal-title":"VLSI"},{"key":"ref11","author":"Gupta","journal-title":"IEDM2021"}],"event":{"name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","location":"Honolulu, HI, USA","start":{"date-parts":[[2024,6,16]]},"end":{"date-parts":[[2024,6,20]]}},"container-title":["2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10631290\/10631310\/10631441.pdf?arnumber=10631441","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,9,2]],"date-time":"2024-09-02T04:43:58Z","timestamp":1725252238000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10631441\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,16]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/vlsitechnologyandcir46783.2024.10631441","relation":{},"subject":[],"published":{"date-parts":[[2024,6,16]]}}}