{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,15]],"date-time":"2025-08-15T01:06:20Z","timestamp":1755219980640,"version":"3.43.0"},"reference-count":5,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,6,16]]},"DOI":"10.1109\/vlsitechnologyandcir46783.2024.10631445","type":"proceedings-article","created":{"date-parts":[[2024,8,26]],"date-time":"2024-08-26T13:23:31Z","timestamp":1724678611000},"page":"1-2","source":"Crossref","is-referenced-by-count":0,"title":["Novel Material, Process and Device Innovations for Next Generation Silicon Carbide (SiC) Trench MOSFET Technology"],"prefix":"10.1109","author":[{"given":"Pratik B.","family":"Vyas","sequence":"first","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ludovico","family":"Megalini","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ashish","family":"Pal","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Joshua","family":"Holt","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Archana","family":"Kumar","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephen","family":"Weeks","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Charisse","family":"Zhao","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lucien","family":"Date","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hansel","family":"Lo","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Michel","family":"Khoury","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Safdar","family":"Muhammad","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fabian","family":"Piallat","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ricky","family":"Fang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"William","family":"Charles","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pratim","family":"Palit","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jinghe","family":"Yang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qintao","family":"Zhang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jang Seok","family":"Oh","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bryan","family":"Turner","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Samphy","family":"Hong","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aswin Prathap","family":"Pitchiya","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Benjamin","family":"Briggs","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiao","family":"Yang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dae","family":"Yang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fengshou","family":"Wang","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Joseph","family":"Lee","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gopal","family":"Prabhu","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dustin","family":"Ho","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Carlos","family":"Caballero","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Durga","family":"Chaturvedula","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zheng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Zheng","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"David A.","family":"Britz","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephen","family":"Krause","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Raghav","family":"Sreenivasan","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Michael","family":"Chudzik","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Subi","family":"Kengeri","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Siddarth","family":"Krishnan","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"El Mehdi","family":"Bazizi","sequence":"additional","affiliation":[{"name":"Applied Materials Inc.,Santa Clara,California,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","first-page":"26.5.1","author":"Nakamura","year":"2011","journal-title":"IEDM"},{"key":"ref2","first-page":"168","author":"Peters","year":"2017","journal-title":"PCIM"},{"key":"ref3","first-page":"39","author":"van der Reijden","year":"2006","journal-title":"IEEE ASMC"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-47648-1_355"},{"issue":"108548","key":"ref5","volume":"200","author":"Vyas","year":"2023","journal-title":"Solid State Electron"}],"event":{"name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","start":{"date-parts":[[2024,6,16]]},"location":"Honolulu, HI, USA","end":{"date-parts":[[2024,6,20]]}},"container-title":["2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10631290\/10631310\/10631445.pdf?arnumber=10631445","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,8,7]],"date-time":"2025-08-07T17:40:33Z","timestamp":1754588433000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10631445\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,16]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/vlsitechnologyandcir46783.2024.10631445","relation":{},"subject":[],"published":{"date-parts":[[2024,6,16]]}}}