{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,1]],"date-time":"2026-07-01T16:49:13Z","timestamp":1782924553637,"version":"3.54.5"},"reference-count":9,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,6,16]],"date-time":"2024-06-16T00:00:00Z","timestamp":1718496000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["RS-2023-00272257"],"award-info":[{"award-number":["RS-2023-00272257"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100008783","name":"National Research Council of Science and Technology","doi-asserted-by":"publisher","award":["CAP-22032-200"],"award-info":[{"award-number":["CAP-22032-200"]}],"id":[{"id":"10.13039\/501100008783","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100004358","name":"Samsung Electronics","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100004358","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,6,16]]},"DOI":"10.1109\/vlsitechnologyandcir46783.2024.10631540","type":"proceedings-article","created":{"date-parts":[[2024,8,26]],"date-time":"2024-08-26T17:23:31Z","timestamp":1724693011000},"page":"1-2","source":"Crossref","is-referenced-by-count":9,"title":["Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping"],"prefix":"10.1109","author":[{"given":"Seung Hyun","family":"Oh","sequence":"first","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chang Hyeon","family":"Lee","sequence":"additional","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hee Tae","family":"Kim","sequence":"additional","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jeong Ik","family":"Park","sequence":"additional","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Min Ju","family":"Kim","sequence":"additional","affiliation":[{"name":"Dankook University,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Se Jun","family":"Park","sequence":"additional","affiliation":[{"name":"Samsung Electronics,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sung Gap","family":"Im","sequence":"additional","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sung Haeng","family":"Cho","sequence":"additional","affiliation":[{"name":"ETRI,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Byung Jin","family":"Cho","sequence":"additional","affiliation":[{"name":"KAIST,Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","author":"Belmonte","year":"2020","journal-title":"IEDM"},{"key":"ref2","author":"Soonoh","year":"2021","journal-title":"J. Alloys Compd"},{"key":"ref3","author":"Shiah","journal-title":"Nature Electronics, 2021"},{"key":"ref4","author":"Zhang","year":"2023","journal-title":"IEDM"},{"key":"ref5","author":"Lu","year":"2017","journal-title":"EDL"},{"key":"ref6","author":"Jaehwan","year":"2018","journal-title":"IEDM"},{"key":"ref7","author":"Jiang","year":"2014","journal-title":"Appl. Phys. Express"},{"key":"ref8","author":"Mativenga","year":"2021","journal-title":"Scientific reports"},{"key":"ref9","author":"Wu","year":"2021","journal-title":"VLSI"}],"event":{"name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","location":"Honolulu, HI, USA","start":{"date-parts":[[2024,6,16]]},"end":{"date-parts":[[2024,6,20]]}},"container-title":["2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10631290\/10631310\/10631540.pdf?arnumber=10631540","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,31]],"date-time":"2024-08-31T04:51:02Z","timestamp":1725079862000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10631540\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,16]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/vlsitechnologyandcir46783.2024.10631540","relation":{},"subject":[],"published":{"date-parts":[[2024,6,16]]}}}