{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T07:36:36Z","timestamp":1722929796251},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/wsc.2002.1166414","type":"proceedings-article","created":{"date-parts":[[2003,6,25]],"date-time":"2003-06-25T21:03:42Z","timestamp":1056575022000},"page":"1431-1435","source":"Crossref","is-referenced-by-count":8,"title":["Using simulation to understand capacity constraints and improve efficiency on process tools"],"prefix":"10.1109","volume":"2","author":[{"given":"M.","family":"Aybar","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"K.","family":"Potti","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"LeBaron","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","article-title":"Using Simulation to Understand and Improve Process Tool Efficiency","author":"pare","year":"2002","journal-title":"Proceedings of the MASM 2002"},{"key":"ref3","article-title":"Using Emulation to Validate a Cluster Tool Simulation Model","author":"hendrickson","year":"2000","journal-title":"Proceedings of the 2000 Winter Simulation Conference"},{"key":"ref2","article-title":"The Simulation of Cluster Tools: A New Semiconductor Manufacturing Technology","author":"pool","year":"1994","journal-title":"Proceedings of the 1994 Winter Simulation Conference"},{"key":"ref1","article-title":"Optimizing Cluster Tool Through-put","author":"hendrickson","year":"1997","journal-title":"Tn Snlid State Terhnology"}],"event":{"name":"2002 Winter Simulation Conference","acronym":"WSC-02","location":"San Diego, CA, USA"},"container-title":["Proceedings of the Winter Simulation Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8343\/26292\/01166414.pdf?arnumber=1166414","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T18:23:36Z","timestamp":1489429416000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1166414\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/wsc.2002.1166414","relation":{},"subject":[]}}