{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,3,22]],"date-time":"2025-03-22T08:45:49Z","timestamp":1742633149983},"reference-count":22,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/wsc.2003.1261573","type":"proceedings-article","created":{"date-parts":[[2004,8,23]],"date-time":"2004-08-23T16:33:14Z","timestamp":1093278794000},"page":"1351-1359","source":"Crossref","is-referenced-by-count":11,"title":["A simulation-based design framework for automated material handling systems in 300 mm fabrication facilities"],"prefix":"10.1109","author":[{"given":"D.","family":"Nazzal","sequence":"first","affiliation":[]},{"given":"D.A.","family":"Bodner","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref10","DOI":"10.1109\/66.939828"},{"doi-asserted-by":"publisher","key":"ref11","DOI":"10.1109\/WSC.1998.745802"},{"key":"ref12","first-page":"187","article-title":"Fab Layout Design Methodology: Case of the 300mm Fabs","author":"meyersdorf","year":"1998","journal-title":"Semi-conduct Int"},{"year":"0","author":"mcginnis","article-title":"Warehouse Design Description Model","key":"ref13"},{"doi-asserted-by":"publisher","key":"ref14","DOI":"10.1109\/ASMC.1997.630776"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.1109\/WSC.2000.899104"},{"key":"ref16","first-page":"23","article-title":"Integration of 300mm Fab Layouts and Material Handling Automation","author":"pillai","year":"1999","journal-title":"Proceedings of the 1999 Winter Simulation Conference"},{"doi-asserted-by":"publisher","key":"ref17","DOI":"10.1109\/ISSM.1997.664481"},{"key":"ref18","first-page":"240","article-title":"Comparative Analysis of 300 mm Automated Material Handling Systems","author":"rust","year":"2002","journal-title":"Modeling and Analysis of Semiconductor Manufacturing Conference"},{"doi-asserted-by":"publisher","key":"ref19","DOI":"10.1109\/WSC.2000.899134"},{"key":"ref4","first-page":"25","article-title":"Fab Design for 300mm Wafer Handling","author":"colvin","year":"1998","journal-title":"Eur Semiconduct"},{"key":"ref3","article-title":"PIMSIM: Controller-Based Simulation and Prototyping of Material Flow Systems","author":"bodner","year":"2002","journal-title":"Progress in Material Handling Research 2002"},{"key":"ref6","first-page":"137","article-title":"Simulation Analysis of a Semiconductor Handling and Processing System: Process Instability Can Lead to Wasted Modeling Efforts","author":"gaxiola","year":"1999","journal-title":"Proceedings 31st Summer Computer Simulation Conference"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1109\/ASMC.1997.630763"},{"key":"ref8","first-page":"405","article-title":"A Focus on Cycle - Time-vs-Tool Utilization “Paradox” With Material Handling Methodology","author":"hom","year":"1998","journal-title":"Proc 1998 IEEE\/SEMI Advanced Semiconductor Manufacturing Conf"},{"doi-asserted-by":"publisher","key":"ref7","DOI":"10.1016\/0360-8352(89)90072-7"},{"key":"ref2","article-title":"Expert Design of Industrial Systems: Formalizing the Design Process","author":"bodner","year":"2001","journal-title":"Proceedings of the Industrial Engineering Research 2001 Conference"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1109\/ISSM.2001.962901"},{"doi-asserted-by":"publisher","key":"ref9","DOI":"10.1109\/ISSM.1997.664525"},{"key":"ref20","first-page":"229","article-title":"An Algorithm for Estimating the Performance of an Automated Material Handling System for the Semiconductor Industry","author":"steele","year":"2002","journal-title":"Modeling and Analysis of Semiconductor Manufacturing Conference"},{"doi-asserted-by":"publisher","key":"ref22","DOI":"10.1109\/ASMC.1997.630765"},{"key":"ref21","first-page":"235","article-title":"Evaluation and Comparison of a Car-Based VS. CFT Material Handling System for a 300mm Fab","author":"tausch","year":"2002","journal-title":"Modeling and Analysis of Semiconductor Manufacturing Conference"}],"event":{"acronym":"WSC-03","name":"2003 Winter Simulation Conference","location":"New Orleans, LA, USA"},"container-title":["Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No.03EX693)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8912\/28189\/01261573.pdf?arnumber=1261573","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T19:16:15Z","timestamp":1489432575000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1261573\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":22,"URL":"https:\/\/doi.org\/10.1109\/wsc.2003.1261573","relation":{},"subject":[]}}