{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,7]],"date-time":"2024-09-07T05:10:46Z","timestamp":1725685846970},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2007,12]]},"DOI":"10.1109\/wsc.2007.4419800","type":"proceedings-article","created":{"date-parts":[[2008,1,4]],"date-time":"2008-01-04T16:05:18Z","timestamp":1199462718000},"page":"1761-1767","source":"Crossref","is-referenced-by-count":3,"title":["An analysis of tool capabilities in the photolithography area of an asic fab"],"prefix":"10.1109","author":[{"given":"P. J.","family":"Byrne","sequence":"first","affiliation":[]},{"given":"Cathal","family":"Heavey","sequence":"additional","affiliation":[]},{"given":"Kamil Erkan","family":"Kabak","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.858502"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2004.1371552"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ROBOT.1987.1087949"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2001.977430"},{"journal-title":"Tecnomatix","year":"2007","key":"ref11"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1080\/09537280600900733"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2002.1001574"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1998.745833"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1999.823298"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/IEMT.2000.910749"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/33.83931"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/66.909654"}],"event":{"name":"2007 Winter Simulation Conference","start":{"date-parts":[[2007,12,9]]},"location":"Washington, DC, USA","end":{"date-parts":[[2007,12,12]]}},"container-title":["2007 Winter Simulation Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4419575\/4419576\/04419800.pdf?arnumber=4419800","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,16]],"date-time":"2017-03-16T18:08:05Z","timestamp":1489687685000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4419800\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007,12]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/wsc.2007.4419800","relation":{},"subject":[],"published":{"date-parts":[[2007,12]]}}}