{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,11]],"date-time":"2024-09-11T05:52:36Z","timestamp":1726033956345},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,12]]},"DOI":"10.1109\/wsc.2011.6147895","type":"proceedings-article","created":{"date-parts":[[2012,2,9]],"date-time":"2012-02-09T22:20:26Z","timestamp":1328826026000},"page":"1803-1815","source":"Crossref","is-referenced-by-count":6,"title":["Automated generation of analytical process time models for cluster tools in semiconductor manufacturing"],"prefix":"10.1109","author":[{"given":"Robert","family":"Kohn","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Oliver","family":"Rose","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","first-page":"349","article-title":"A Simulation-based Analysis of the Cycle Time of Cluster Tools in Semiconductor Manufacturing","author":"niedermeyer","year":"2003","journal-title":"Proceedings of the 15th European Simulation Symposium"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736339"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.1994.588245"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/66.311340"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/66.536105"},{"key":"ref5","article-title":"Approximation of the Cycle Time of Cluster Tools in Semiconductor Manufacturing","author":"niedermeyer","year":"2004","journal-title":"Proc Industrial Engineering Research Conf (IERC)"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2006.322964"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2006.322959"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2010.5551413"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2007.4419799"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2007.4446810"}],"event":{"name":"2011 Winter Simulation Conference - (WSC 2011)","start":{"date-parts":[[2011,12,11]]},"location":"Phoenix, AZ, USA","end":{"date-parts":[[2011,12,14]]}},"container-title":["Proceedings of the 2011 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6135535\/6147014\/06147895.pdf?arnumber=6147895","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T18:39:59Z","timestamp":1490121599000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6147895\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,12]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/wsc.2011.6147895","relation":{},"subject":[],"published":{"date-parts":[[2011,12]]}}}