{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T16:56:02Z","timestamp":1729616162615,"version":"3.28.0"},"reference-count":27,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/wsc.2012.6465086","type":"proceedings-article","created":{"date-parts":[[2013,3,1]],"date-time":"2013-03-01T08:24:26Z","timestamp":1362126266000},"page":"1-13","source":"Crossref","is-referenced-by-count":0,"title":["Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool"],"prefix":"10.1109","author":[{"given":"Anna","family":"Rotondo","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"John","family":"Geraghty","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Paul","family":"Young","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736308"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1080\/00207540600792531"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1145\/256563.256852"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2040999"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2000.899119"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-24587-2_33"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1145\/324138.324465"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2010.5678954"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1016\/j.compchemeng.2004.07.007"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736319"},{"key":"20","article-title":"A simulation-based analysis of the cycle time of cluster tools in semiconductor manufacturing","author":"niedermayer","year":"2003","journal-title":"Proceedings of the 15th European Simulation Symposium"},{"key":"22","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/ISSM.2007.4446806","article-title":"Analysis of the front-end wet strip efficiency performance for productivity","author":"quek","year":"2007","journal-title":"Semiconductor Manufacturing 2007 ISSM 2007 International Symposium on"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1109\/66.857935"},{"key":"24","first-page":"69","article-title":"A comparison of genetic sequencing operators","author":"starkweather","year":"1991","journal-title":"Proceedings of the 4th International Conference on Genetic Algorithms"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2011.575090"},{"key":"26","article-title":"A CP-based approach for scheduling of automated wet-etch stations","author":"zeballos","year":"2010","journal-title":"Proceedings of the 2nd International Conference on Engineering Optimisation"},{"key":"27","doi-asserted-by":"publisher","DOI":"10.1021\/ie1016199"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1021\/ie020296c"},{"key":"2","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1007\/978-3-540-69389-5_5","article-title":"Symbiotic simulation control in semiconductor manufacturing","author":"aydt","year":"2008","journal-title":"Proceedings of Computational Science-ICCS 2008"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-007-1146-1"},{"key":"1","first-page":"883","article-title":"A novel optimization method to automated wetetch station scheduling in semiconductor manufacturing systems","volume":"28","author":"aguirre","year":"2011","journal-title":"Computers & Chemical Engineering"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2006.322961"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1999.823300"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1021\/ie200841a"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/S0098-1354(03)00192-3"},{"key":"9","doi-asserted-by":"crossref","first-page":"1398","DOI":"10.1109\/WSC.2003.1261582","article-title":"Resident-entity based simulation of batch chamber tools in 300 mm semiconductor manufacturing","author":"govind","year":"2003","journal-title":"Proceedings of the 2003 Winter Simulation Conference"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1016\/S0278-6125(97)85674-9"}],"event":{"name":"2012 Winter Simulation Conference - (WSC 2012)","start":{"date-parts":[[2012,12,9]]},"location":"Berlin, Germany","end":{"date-parts":[[2012,12,12]]}},"container-title":["Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6451330\/6464965\/06465086.pdf?arnumber=6465086","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T04:29:54Z","timestamp":1498019394000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6465086\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":27,"URL":"https:\/\/doi.org\/10.1109\/wsc.2012.6465086","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}