{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T16:37:13Z","timestamp":1730306233240,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/wsc.2012.6465135","type":"proceedings-article","created":{"date-parts":[[2013,3,1]],"date-time":"2013-03-01T13:24:26Z","timestamp":1362144266000},"page":"1-11","source":"Crossref","is-referenced-by-count":0,"title":["Single toolset modeling approaches in semiconductor manufacturing"],"prefix":"10.1109","author":[{"given":"Kamil Erkan","family":"Kabak","sequence":"first","affiliation":[]},{"given":"Cathal","family":"Heavey","sequence":"additional","affiliation":[]},{"given":"Brian","family":"Kernan","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"journal-title":"Theory of Modelling and Simulation","year":"1976","author":"zeigler","key":"15"},{"key":"13","first-page":"702","article-title":"Capacity planning of a photolithographywork cell in awafer manufacturing line","author":"spence","year":"1987","journal-title":"IEEE International Conference on Robotics and Automation"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2010.2094630"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2007.4419793"},{"journal-title":"Tecnomatix Plant Simulation 9 0 1","year":"2010","key":"12"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815215"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2007.4419800"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1080\/002075400188997"},{"key":"10","first-page":"1481","article-title":"Why do simple wafer fab models fail in certain scenarios?","volume":"2","author":"rose oliver","year":"2000","journal-title":"Winter Simulation Conference Proceedings"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1998.745833"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2001.977430"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736318"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.873398"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1999.823297"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.1998.745805"}],"event":{"name":"2012 Winter Simulation Conference - (WSC 2012)","start":{"date-parts":[[2012,12,9]]},"location":"Berlin, Germany","end":{"date-parts":[[2012,12,12]]}},"container-title":["Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6451330\/6464965\/06465135.pdf?arnumber=6465135","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T17:09:42Z","timestamp":1490202582000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6465135\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/wsc.2012.6465135","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}