{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,31]],"date-time":"2025-08-31T23:27:46Z","timestamp":1756682866450,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/wsc.2012.6465278","type":"proceedings-article","created":{"date-parts":[[2013,3,1]],"date-time":"2013-03-01T13:24:26Z","timestamp":1362144266000},"page":"1-12","source":"Crossref","is-referenced-by-count":2,"title":["Identifying ill tool combinations via Gibbs Sampler for semiconductor manufacturing yield diagnosis"],"prefix":"10.1109","author":[{"given":"Yu-Chin","family":"Hsu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rong-Huei","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chih-Min","family":"Fan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2009.2025812"},{"journal-title":"System and Method for Finding An Operation\/tool Combination That Causes Integrated Failure in A Semiconductor Fabrication Facility Google Patents","year":"2003","author":"nicholson","key":"13"},{"journal-title":"Spatial Patterns in Sort Wafer Maps and Identifying Fab Tool Commonalities","year":"2008","author":"pierre","key":"14"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2041450"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2005.852118"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.2307\/2685208"},{"journal-title":"Classification and Regression Trees Wadsworth","year":"1984","author":"breiman","key":"2"},{"key":"1","doi-asserted-by":"crossref","first-page":"1165","DOI":"10.1214\/aos\/1013699998","article-title":"The control of the false discovery rate in multiple testing under dependency","volume":"29","author":"benjamini","year":"2001","journal-title":"Annals of Statistics"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2000.902565"},{"journal-title":"Data Mining and Fault Diagnosis Based on Wafer Acceptance Test Data and In-line Manufacturing Data","year":"2001","author":"fan","key":"7"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.901398"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2006.04.014"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2010.2048968"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2002.1001604"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.2307\/2290777"}],"event":{"name":"2012 Winter Simulation Conference - (WSC 2012)","start":{"date-parts":[[2012,12,9]]},"location":"Berlin, Germany","end":{"date-parts":[[2012,12,12]]}},"container-title":["Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6451330\/6464965\/06465278.pdf?arnumber=6465278","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,2,9]],"date-time":"2022-02-09T19:31:35Z","timestamp":1644435095000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6465278\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/wsc.2012.6465278","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}