{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,26]],"date-time":"2025-12-26T07:14:16Z","timestamp":1766733256610},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/wsc.2012.6465296","type":"proceedings-article","created":{"date-parts":[[2013,3,1]],"date-time":"2013-03-01T13:24:26Z","timestamp":1362144266000},"page":"1-9","source":"Crossref","is-referenced-by-count":7,"title":["Industrial implementation of a dynamic sampling algorithm in semiconductor manufacturing: Approach and challenges"],"prefix":"10.1109","author":[{"given":"Justin Nduhura","family":"Munga","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephane","family":"Dauzere-Peres","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Philippe","family":"Vialletelle","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Claude","family":"Yugma","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2011.6147904"},{"key":"11","first-page":"44","article-title":"Method and system for determining optimal wafer sampling in real-time inline monitoring and experimental design","author":"sun","year":"2008","journal-title":"Proceedings of the 2008 IEEE International Symposium on Semiconductor Manufacturing"},{"journal-title":"21st Century Manufacturing","year":"2001","author":"wright","key":"12"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2010.5551470"},{"key":"2","first-page":"25","article-title":"Adaptive sampling methodology for in-line defect inspection","author":"bousetta","year":"2005","journal-title":"ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-008-0103-7"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2007.4446897"},{"key":"7","first-page":"43","article-title":"Inline automated defect classification: A novel approach to defect management","author":"pepper","year":"2005","journal-title":"ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings"},{"journal-title":"Literature Review on Sampling Techniques in Semiconductor Manufacturing","year":"2012","author":"nduhura munga","key":"6"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.2011.5898167"},{"key":"4","first-page":"12","article-title":"Adaptive metrology sampling techniques enabling higher precision in variability detection and control","author":"scott","year":"2007","journal-title":"ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings"},{"key":"9","first-page":"1918","article-title":"Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing","author":"rodriguez-verjan","year":"2011","journal-title":"MASM 2011 (7th International Conference on Modeling and Analysis of Semiconductor Manufacturing) Proceedings of the 2011 Winter Simulation Conference"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/ISSM.2007.4446804"}],"event":{"name":"2012 Winter Simulation Conference - (WSC 2012)","start":{"date-parts":[[2012,12,9]]},"location":"Berlin, Germany","end":{"date-parts":[[2012,12,12]]}},"container-title":["Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6451330\/6464965\/06465296.pdf?arnumber=6465296","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T16:55:13Z","timestamp":1490201713000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6465296\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/wsc.2012.6465296","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}