{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,4,4]],"date-time":"2025-04-04T08:07:06Z","timestamp":1743754026876,"version":"3.28.0"},"reference-count":21,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,12]]},"DOI":"10.1109\/wsc.2012.6465316","type":"proceedings-article","created":{"date-parts":[[2013,3,1]],"date-time":"2013-03-01T08:24:26Z","timestamp":1362126266000},"page":"1-12","source":"Crossref","is-referenced-by-count":5,"title":["Improving cluster tools performance using Colored Petri Nets in semiconductor manifacturing"],"prefix":"10.1109","author":[{"given":"DongJin","family":"Kim","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Emrah","family":"Cimren","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Robert","family":"Havey","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Abbas K.","family":"Zaidi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1109\/66.705374"},{"key":"17","first-page":"36","article-title":"Performance modeling of cluster tools using timed petri nets","author":"shin","year":"1999","journal-title":"Proc Int Conf Semiconductor Manufacturing Operational Modeling and Simulation"},{"key":"18","first-page":"113","article-title":"The driving forces in cluster tool development","author":"singer","year":"1995","journal-title":"Semiconductor Int"},{"key":"15","first-page":"58","article-title":"Demonstrated benefits of cluster tool sim","author":"pederson","year":"2002","journal-title":"Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing"},{"key":"16","first-page":"1755","article-title":"Predicting cluster tool behavior with slow down factors","author":"rose","year":"2007","journal-title":"Proceeding of the 2007 Winter Simulation Conference"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736310"},{"key":"14","first-page":"1","article-title":"Operating strategies of cluster tools with intermediate buffers","author":"paek","year":"2002","journal-title":"Proceedings of The Seventh Annual International Conference on Industrial Engineering"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1145\/324138.324465"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/COASE.2010.5584562"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1109\/ICSMC.2000.884468"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2008.4736311"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1109\/ICFCC.2010.5497380"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/WCICA.2010.5553803"},{"volume":"24","journal-title":"Brooks Automation Web Page","year":"2012","key":"1"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/COASE.2008.4626441"},{"key":"7","first-page":"1","article-title":"Design of standard modeling process for tool sequencing optimization under given robot control logics","author":"hsu","year":"2010","journal-title":"Proc of 2010 International Symposium on Semiconductor Manufacturing"},{"journal-title":"Computers and Intractability A Guide to the Theory of NPcompleteness","year":"1979","author":"garey","key":"6"},{"journal-title":"Robotic Fowshop Scheduling Is Strongly Np-Complete","year":"1997","author":"crama","key":"5"},{"journal-title":"CPN Tools Web Page","year":"2012","key":"4"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1007\/b95112"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.1998.705369"}],"event":{"name":"2012 Winter Simulation Conference - (WSC 2012)","start":{"date-parts":[[2012,12,9]]},"location":"Berlin, Germany","end":{"date-parts":[[2012,12,12]]}},"container-title":["Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6451330\/6464965\/06465316.pdf?arnumber=6465316","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T15:41:44Z","timestamp":1490197304000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6465316\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,12]]},"references-count":21,"URL":"https:\/\/doi.org\/10.1109\/wsc.2012.6465316","relation":{},"subject":[],"published":{"date-parts":[[2012,12]]}}}