{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,27]],"date-time":"2026-08-27T05:39:14Z","timestamp":1787809154579,"version":"build-2784847793"},"reference-count":52,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,12,15]],"date-time":"2024-12-15T00:00:00Z","timestamp":1734220800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,12,15]],"date-time":"2024-12-15T00:00:00Z","timestamp":1734220800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,12,15]]},"DOI":"10.1109\/wsc63780.2024.10838845","type":"proceedings-article","created":{"date-parts":[[2025,1,20]],"date-time":"2025-01-20T13:40:24Z","timestamp":1737380424000},"page":"1943-1954","source":"Crossref","is-referenced-by-count":3,"title":["Digital Twin Based Uncertainty Informed Time Constraint Control in Semiconductor Manufacturing"],"prefix":"10.1109","author":[{"given":"Marvin Carl","family":"May","sequence":"first","affiliation":[{"name":"Wbk Institute of Production Science, Karlsruhe Institute of Technology (KIT),Karlsruhe,Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lars","family":"Kiefer","sequence":"additional","affiliation":[{"name":"Wbk Institute of Production Science, Karlsruhe Institute of Technology (KIT),Karlsruhe,Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Gisela","family":"Lanza","sequence":"additional","affiliation":[{"name":"Wbk Institute of Production Science, Karlsruhe Institute of Technology (KIT),Karlsruhe,Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1007\/s11740-020-00967-8"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.cor.2016.01.017"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/tsm.2015.2478281"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/asmc.2006.1638740"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1007\/s10479-018-3034-5"},{"key":"ref6","article-title":"Scheduling batches with time constraints in a job shop system: developing two approaches for semiconductor industry","volume-title":"XIX Summer School \u201cFrancesco Turco\u201d - Industrial Mechanical Plants","author":"Ciccullo","year":"2014"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2023.109012"},{"issue":"1","key":"ref8","doi-asserted-by":"crossref","first-page":"1101","DOI":"10.1016\/j.ifacol.2017.08.391","article-title":"A Branch and Bound Algorithm for Three-Machine Flow Shop with Overlapping Waiting Time Constraints","volume":"50","author":"Kim","year":"2017","journal-title":"IFAC-PapersOnLine"},{"key":"ref9","first-page":"1","article-title":"Scheduling jobs with time constraints between consecutive process steps in semiconductor manufacturing","volume-title":"Proceedings of the 2012 Winter Simulation Conference (WSC)","author":"Klemmt","year":"2012"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/emdc.2013.6756052"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"1813","DOI":"10.1109\/WSC48552.2020.9383889","article-title":"Integrating Critical Queue Time Constraints Into SMT2020 Simulation Models","volume-title":"Proceedings of the 2020 Winter Simulation Conference (WSC)","author":"Kopp","year":"2020"},{"issue":"19","key":"ref12","doi-asserted-by":"crossref","first-page":"5812","DOI":"10.1080\/00207543.2021.1972179","article-title":"Explainable reinforcement learning in production control of job shop manufacturing system","volume":"60","author":"Kuhnle","year":"2022","journal-title":"International Journal of Production Research"},{"key":"ref13","doi-asserted-by":"crossref","DOI":"10.1155\/2020\/8833645","article-title":"A genetic algorithm for a two-machine flowshop with a limited waiting time constraint and sequence-dependent setup times","volume-title":"Mathematical Problems in Engineering","author":"Lee","year":"2020"},{"issue":"3\u201311","key":"ref14","article-title":"Sampling-based release control of multiple lots in time constraint tunnels","volume":"110","author":"Lima","year":"2019","journal-title":"Computers in Industry"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"3543","DOI":"10.1109\/WSC.2017.8248068","article-title":"Analyzing different dispatching policies for probability estimation in time constraint tunnels in semiconductor manufacturing","volume-title":"2017 Winter Simulation Conference (WSC)","author":"Lima","year":"2017"},{"key":"ref16","doi-asserted-by":"crossref","first-page":"309","DOI":"10.1109\/ASMC.2017.7969250","article-title":"A decision support system for managing line stops of time constraint tunnels: FA, IE","volume-title":"2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","author":"Lima","year":"2017"},{"issue":"3","key":"ref17","doi-asserted-by":"crossref","first-page":"860","DOI":"10.1080\/00207543.2020.1711984","article-title":"A sampling-based approach for managing lot release in time constraint tunnels in semiconductor manufacturing","volume":"59","author":"Lima","year":"2021","journal-title":"International Journal of Production Research"},{"key":"ref18","doi-asserted-by":"crossref","DOI":"10.1109\/ISSE.2017.8000944","article-title":"A comparison of control methods for production areas with time constraints and tool interruptions in semiconductor manufacturing","volume-title":"2017 40th International Spring Seminar on Electronics Technology (ISSE)","author":"Maleck","year":"2017"},{"key":"ref19","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/ASMC.2019.8791779","article-title":"A Robust Multi-Stage Scheduling Approach for Semiconductor Manufacturing Production Areas with Time Contraints","volume-title":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","author":"Maleck","year":"2019"},{"key":"ref20","doi-asserted-by":"crossref","DOI":"10.1109\/WSC.2018.8632404","article-title":"A comparison of an CP and MIP approach for scheduling jobs in production areas with time constraints and uncertainties","volume-title":"2018 Winter Simulation Conference (WSC), 3526\u20133537","author":"Maleck","year":"2018"},{"issue":"2","key":"ref21","doi-asserted-by":"crossref","first-page":"322","DOI":"10.3390\/forecast3020021","article-title":"Queue Length Forecasting in Complex Manufacturing Job Shops","volume":"3","author":"May","year":"2021","journal-title":"Forecasting"},{"key":"ref22","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1016\/j.procir.2021.10.008","article-title":"Multi-variate time-series for time constraint adherence prediction in complex job shops","volume":"103","author":"May","year":"2021","journal-title":"Procedia CIRP"},{"issue":"3","key":"ref23","doi-asserted-by":"crossref","DOI":"10.3390\/app12031608","article-title":"Ontology-Based Production Simulation with OntologySim","volume":"12","author":"May","year":"2022","journal-title":"Applied Sciences"},{"key":"ref24","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/j.procir.2021.05.008","article-title":"Data analytics for time constraint adherence prediction in a semiconductor manufacturing use-case","volume":"100","author":"May","year":"2021","journal-title":"Procedia CIRP"},{"key":"ref25","doi-asserted-by":"crossref","first-page":"184","DOI":"10.1016\/j.procir.2022.10.071","article-title":"Applying natural language processing in manufacturing","volume":"115","author":"May","year":"2022","journal-title":"Procedia CIRP"},{"key":"ref26","article-title":"Automated model generation framework for material flow simulations of production systems","author":"May","year":"2024","journal-title":"International Journal of Production Research 62(1\u20132):141-156"},{"key":"ref27","first-page":"1","article-title":"Managing product-inherent constraints with artificial intelligence: production control for time constraints in semiconductor manufacturing","author":"May","year":"2024","journal-title":"Journal of Intelligent Manufacturing"},{"key":"ref28","doi-asserted-by":"crossref","first-page":"27","DOI":"10.1016\/j.procir.2021.03.005","article-title":"Foresighted digital twin for situational agent selection in production control","volume":"99","author":"May","year":"2021","journal-title":"Procedia CIRP"},{"key":"ref29","doi-asserted-by":"crossref","first-page":"502","DOI":"10.1016\/j.ijinfomgt.2019.05.020","article-title":"Machine learning based digital twin framework for production optimization in petrochemical industry","volume":"49","author":"Min","year":"2019","journal-title":"International Journal of Information Management"},{"issue":"6","key":"ref30","doi-asserted-by":"crossref","first-page":"583","DOI":"10.1007\/s10951-010-0222-9","article-title":"A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations","volume":"14","author":"Monch","year":"2011","journal-title":"Journal of Scheduling"},{"key":"ref31","doi-asserted-by":"crossref","DOI":"10.1007\/978-1-4614-4472-5","volume-title":"Production planning and control for semiconductor wafer fabrication facilities: Modeling, analysis, and systems","author":"Monch","year":"2013"},{"key":"ref32","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/j.cor.2019.03.004","article-title":"Parallel machine scheduling with time constraints on machine qualifications","volume":"107","author":"Nattaf","year":"2019","journal-title":"Computers & Operations Research"},{"key":"ref33","doi-asserted-by":"crossref","DOI":"10.1016\/j.promfg.2017.07.198","article-title":"A review of the roles of digital twin in CPS-based production systems","author":"Negri","year":"2017","journal-title":"Procedia Manufacturing 11:939\u2013948"},{"key":"ref34","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1109\/ISSM.2006.4493020","article-title":"Risk Based Capacity Planning Method for Semiconductor Fab with Queue Time Constraints","volume-title":"2006 IEEE International Symposium on Semiconductor Manufacturing","author":"Ono","year":"2006"},{"key":"ref35","doi-asserted-by":"crossref","DOI":"10.1109\/WSC.2016.7822329","article-title":"Impact of time bound constraints and batching on metallization in an opto-semiconductor fab","volume-title":"Proceedings of the 2016 Winter Simulation Conference (WSC), 2947\u20132957","author":"Pappert","year":"2016"},{"issue":"1","key":"ref36","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1504\/IJOR.2020.104222","article-title":"Scheduling batches with time constraints in wafer fabrication","volume":"37","author":"Pirovano","year":"2020","journal-title":"International Journal of Operational Research"},{"key":"ref37","first-page":"880","article-title":"Capacity planning for semiconductor wafer fabrication with time constraints between operations","volume-title":"Proceedings of the 31st Conference on Winter Simulation: Simulation-a bridge to the future","volume":"1","author":"Robinson","year":"1999"},{"key":"ref38","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1109\/ASMC.2015.7164446","article-title":"Production control in semiconductor manufacturing with time constraints","volume-title":"2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","author":"Sadeghi","year":"2015"},{"issue":"3","key":"ref39","doi-asserted-by":"crossref","first-page":"273","DOI":"10.1109\/66.857935","article-title":"Implementation of modeling and simulation in semi- conductor wafer fabrication with time constraints between wet etch and furnace operations","volume":"13","author":"Scholl","year":"2000","journal-title":"IEEE Transactions on Semiconductor Manufacturing"},{"key":"ref40","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/eMDC.2013.6756046","article-title":"Proactive control of engineering operations and lot loadings of product-mix and re-entrant in Q-time constraints processes","volume-title":"2013 e-Manufacturing & Design Collaboration Symposium (eMDC)","author":"Toyoshima","year":"2013"},{"issue":"10","key":"ref41","doi-asserted-by":"crossref","first-page":"2907","DOI":"10.1080\/00207541003730854","article-title":"Model to determine the capacity of wafer fabrications for batch-serial processes with time constraints","volume":"49","author":"Tu","year":"2011","journal-title":"International Journal of Production Research"},{"issue":"133\u2013136","key":"ref42","article-title":"Digital technologies in circular economy transition: evidence from case studies","volume":"90","author":"Ucar","year":"2020","journal-title":"Procedia CIRP"},{"key":"ref43","doi-asserted-by":"crossref","first-page":"335","DOI":"10.1016\/j.procir.2016.11.152","article-title":"The digital twin: Realizing the cyber-physical production system for industry 4.0","volume":"61","author":"Uhlemann","year":"2017","journal-title":"Procedia CIRP"},{"key":"ref44","doi-asserted-by":"crossref","first-page":"518","DOI":"10.1016\/j.jmsy.2022.07.016","article-title":"Opportunistic maintenance scheduling with deep reinforcement learning","volume":"64","author":"Valet","year":"2022","journal-title":"Journal of Manufacturing Systems"},{"issue":"2","key":"ref45","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1109\/TSM.2018.2826530","article-title":"Job Dispatch Control for Production Lines With Overlapped Time Window Constraints","volume":"31","author":"Wang","year":"2018","journal-title":"IEEE Transactions on Semiconductor Manufacturing"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1109\/WSC.2016.7822332"},{"key":"ref47","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1016\/j.cie.2016.04.003","article-title":"Multiple product admission control in semiconductor manufacturing systems with process queue time (PQT) constraints","volume":"99","author":"Wu","year":"2016","journal-title":"Computers & Industrial Engineering"},{"key":"ref48","doi-asserted-by":"crossref","first-page":"3630","DOI":"10.1109\/WSC.2013.6721724","article-title":"Two-stage lot scheduling with waiting time constraints and due dates","volume-title":"Proceedings of the 2013 Winter Simulations Conference (WSC)","author":"Yu","year":"2013"},{"key":"ref49","doi-asserted-by":"crossref","first-page":"2903","DOI":"10.1109\/WSC.2016.7822325","article-title":"Time bound control in a stochastic dynamic wafer fab","volume-title":"Proceedings of the 2016 Winter Simulation Conference (WSC)","author":"Zhang","year":"2016"},{"key":"ref50","doi-asserted-by":"crossref","first-page":"338","DOI":"10.1109\/COASE.2019.8842869","article-title":"A Cuckoo Search-Based Scheduling Algorithm for a Semiconductor Production Line with Constrained Waiting Time","volume-title":"2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)","author":"Zhou","year":"2019"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1109\/icis.2017.7960099"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.1109\/coase.2017.8256237"}],"event":{"name":"2024 Winter Simulation Conference (WSC)","location":"Orlando, FL, USA","start":{"date-parts":[[2024,12,15]]},"end":{"date-parts":[[2024,12,18]]}},"container-title":["2024 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10838618\/10838619\/10838845.pdf?arnumber=10838845","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,21]],"date-time":"2025-01-21T01:34:58Z","timestamp":1737423298000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10838845\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,12,15]]},"references-count":52,"URL":"https:\/\/doi.org\/10.1109\/wsc63780.2024.10838845","relation":{},"subject":[],"published":{"date-parts":[[2024,12,15]]}}}