{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,1,22]],"date-time":"2025-01-22T05:05:45Z","timestamp":1737522345682,"version":"3.33.0"},"reference-count":38,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,12,15]],"date-time":"2024-12-15T00:00:00Z","timestamp":1734220800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,12,15]],"date-time":"2024-12-15T00:00:00Z","timestamp":1734220800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,12,15]]},"DOI":"10.1109\/wsc63780.2024.10838987","type":"proceedings-article","created":{"date-parts":[[2025,1,20]],"date-time":"2025-01-20T18:40:24Z","timestamp":1737398424000},"page":"1907-1918","source":"Crossref","is-referenced-by-count":0,"title":["Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma"],"prefix":"10.1109","author":[{"given":"Lado","family":"Filipovic","sequence":"first","affiliation":[{"name":"CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors at the Institute for Microelectronics, TU Wien,Vienna,Austria,1040"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tobias","family":"Reiter","sequence":"additional","affiliation":[{"name":"CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors at the Institute for Microelectronics, TU Wien,Vienna,Austria,1040"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2022.111414"},{"volume-title":"Introduction to Implicit Surfaces.","year":"1997","author":"Bloomenthal","key":"ref2"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/mi14030665"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.3390\/atoms9010016"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1116\/1.1342866"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1116\/1.1494818"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1116\/1.4819316"},{"volume-title":"Numerical Methods for Topography Simulation. Ph.D. thesis","year":"2010","author":"Ertl","key":"ref8"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.cpc.2009.02.002"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/S0042-207X(02)00173-2"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1023\/A:1017958621586"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1007\/s41614-022-00084-2"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1007\/s11664-015-3786-5"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.3390\/mi12080991"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2011.08.002"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1116\/1.582133"},{"volume-title":"Emulation and Simulation of Microelectronic Fabrication Processes. Ph.D. thesis","year":"2022","author":"Klemenschits","key":"ref17"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.3390\/mi9120631"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1063\/5.0189397"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1116\/1.4936885"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2016.10.029"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/0092-640X(84)90016-0"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1016\/0021-9991(88)90002-2"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1137\/0728049"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1007\/s11090-023-10318-x"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1063\/1.369701"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2023.108816"},{"volume-title":"ViennaPS 2.0.0.","year":"2024","author":"Reiter","key":"ref28"},{"issue":"2024a","key":"ref29","volume-title":"ViennaLS 3.1.0.","author":"Reiter","year":"2024"},{"issue":"2024b","key":"ref30","volume-title":"ViennaRay 2.1.0.","author":"Reiter","year":"2024"},{"volume-title":"Level Set Methods and Fast Marching Methods.","year":"1999","author":"Sethian","key":"ref31"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1134\/S1063739716030070"},{"volume-title":"LXCat 6.2.","year":"2023","key":"ref33"},{"volume-title":"Physical Chemistry.","year":"2022","author":"Silbey","key":"ref34"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1063\/1.102336"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1116\/1.1612517"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1007\/s42341-022-00408-6"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2011.08.006"}],"event":{"name":"2024 Winter Simulation Conference (WSC)","start":{"date-parts":[[2024,12,15]]},"location":"Orlando, FL, USA","end":{"date-parts":[[2024,12,18]]}},"container-title":["2024 Winter Simulation Conference (WSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10838618\/10838619\/10838987.pdf?arnumber=10838987","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,21]],"date-time":"2025-01-21T06:46:31Z","timestamp":1737441991000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10838987\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,12,15]]},"references-count":38,"URL":"https:\/\/doi.org\/10.1109\/wsc63780.2024.10838987","relation":{},"subject":[],"published":{"date-parts":[[2024,12,15]]}}}