{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,2]],"date-time":"2026-10-02T01:58:44Z","timestamp":1790906324165,"version":"4.1.0"},"reference-count":20,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"10","license":[{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62004029"],"award-info":[{"award-number":["62004029"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62074029"],"award-info":[{"award-number":["62074029"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61804023"],"award-info":[{"award-number":["61804023"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61971108"],"award-info":[{"award-number":["61971108"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100018525","name":"Key Research and Development Program of Sichuan Province","doi-asserted-by":"publisher","award":["2020ZHCG0038"],"award-info":[{"award-number":["2020ZHCG0038"]}],"id":[{"id":"10.13039\/501100018525","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100012542","name":"Sichuan Science and Technology Program","doi-asserted-by":"publisher","award":["2020YJ0015"],"award-info":[{"award-number":["2020YJ0015"]}],"id":[{"id":"10.13039\/100012542","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Trans. Ultrason., Ferroelect., Freq. Contr."],"published-print":{"date-parts":[[2023,10]]},"DOI":"10.1109\/tuffc.2023.3257327","type":"journal-article","created":{"date-parts":[[2023,3,15]],"date-time":"2023-03-15T17:43:02Z","timestamp":1678902182000},"page":"1252-1260","source":"Crossref","is-referenced-by-count":3,"title":["Investigation on Quasi-Lamb Wave Modes in AlN-on-Si MEMS Resonators"],"prefix":"10.1109","volume":"70","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4655-6202","authenticated-orcid":false,"given":"Cheng","family":"Tu","sequence":"first","affiliation":[{"name":"School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Linqian","family":"Qiao","sequence":"additional","affiliation":[{"name":"School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lei","family":"Li","sequence":"additional","affiliation":[{"name":"School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0004-4378-3452","authenticated-orcid":false,"given":"Yu","family":"Chen","sequence":"additional","affiliation":[{"name":"School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaosheng","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref13","author":"graff","year":"1975","journal-title":"Wave Motion in Elastic Solids"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1063\/1.5046120"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/58.19155"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2016.7421794"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2020.3049084"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2019.2939190"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2018.2867813"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2290793"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/23\/4\/043001"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2000.922679"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2016.12.019"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2010.1376"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/25\/11\/115020"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/LSENS.2020.3011642"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2020.3010283"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2019.8808236"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2019.2907085"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2012.2228671"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.3390\/s20174978"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2007.906758"}],"container-title":["IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/58\/10287225\/10070867.pdf?arnumber=10070867","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,11,6]],"date-time":"2023-11-06T19:34:29Z","timestamp":1699299269000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10070867\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,10]]},"references-count":20,"journal-issue":{"issue":"10"},"URL":"https:\/\/doi.org\/10.1109\/tuffc.2023.3257327","relation":{},"ISSN":["0885-3010","1525-8955"],"issn-type":[{"value":"0885-3010","type":"print"},{"value":"1525-8955","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,10]]}}}